BiS 672

NEMS

Fall, 2010

Homework #1 Miniaturization Technology

We consider three different fabrication technologies for the

miniaturization of structures, devices and systems and have included 1) precision-machining technology, 2) micro-machining technology and 3) nano-machining technology. [Problem 1] State and compare the fundamental methods and tools used in the three fabrication technologies for miniaturization. [Problem 2] Discuss the generic features and characteristics of the miniaturized structures fabricated by the three fabrication technologies. The generic features and characteristics to be discussed are 1) Geometry (dimensions, sizes, shape, etc), 2) Materials (types, composition, atomic structure, etc.) 3) Production (time, cost, uniformity, etc.) of the fabricated structures. [Problem 3] Consider the miniaturization of electromechanical devices, where electrical and mechanical structures are integrated together with optical and/or biological structures to achieve advanced functions. For each fabrication technology including precision-, micro-, and nano-technology, discuss how to fabricate the miniaturized electromechanical devices.

Department of Bio and Brain Engineering

Prof. Young-Ho Cho

KAIST