Overview of MEMS Applications

Chang Liu Micro Actuators, Sensors, Systems Group University of Illinois at Urbana-Champaign

Note from 8/27/2005 teaching

I can cover up to page 61 in 1.5 hour. Should get rid of the DNA array part after page 61 maybe add some of new Quake stuff from multiplexed bio sample processing. In the end, add a page saying that this slides show the excitement of MEMS. We will teach you skills and knowledge for future.

Get Scale Straight

1 m = 1/1000 mm 1 nm = 1/1000 m = 1/1,000,000 mm Characteristic length scale of MEMS
1 micrometer to 1 mm Special case: large distributed array.

1 4 0 0

15 mm Large array Small nodes

10,000 Meter Scale

1000 meter scale

100 meter scale

10 Meter

1 meter

0.1 m

0.01 meter, or 10 mm

0.001 meter, or 1 mm

0.1 mm, or 100 micrometer

10 micrometer

1 micrometer

0.1 micrometer

0.01 micrometer, or 10 nm

The realm of molecules, DNA, proteins, and atoms.

Dentists drill (1 mm)

Velcro ( 1 mm)

Artery ( 1 mm)

Muscle Fiber ( 1 m)

At 1 micrometer and slightly below

Cell division

Bacteria

Small is Powerful
MEMS is a class of device As well as a means of fabrication and manufacturing.

Interdisciplinary
Traditional
Above mm: traditional mechanics Micron to mm: microelectronics and electrical engineering Nanometer to micron: chemists

Now
Micro Nano Engineering Chemistry Feeds each other and form a coherent platform of knowledge and innovation.

Outline
Microelectronics and MEMS Stories from the early days MEMS in the 1990s MEMS for the twenty first century

A Macro Electromechanical system

Microelectronics The IT Backbone

Microelectronics and optoelectronics

Infrastructure of todays information technology communication, computation, control Model, design, fabrication technology, and device implementation for tomorrows micro processors and communications chips
Digital photography

Fiber for fast internet

IBM GB hard drive

Low lost, photoQuality Ink Jet

Personal communication

Micro Electro Mechanical Systems

Accelerometer (Analog Devices)

Digital Light Processors (DLP) (Texas Instruments)

Ink Jet Nozzle (HP)

Miniaturization & Resolution (1 m-1mm)

Mechanics/ Electronics Integration

Parallel Fabrication

Market Size
Ink jet
HP: 650 Million a year Epson and Xerox: 350 Million

TI DLP
600 Million a year

Accelerometer
ADI: 120 million a year Freescale Semiconductor: 100 Million

1st transistor (1947)

Materials Processes Equipment

bioMEMS and microfluid

micromotor

Petersen paper

Power Elec. Dist. MEMS Env. Monit. Biometrics Security Inertial Sen. Data store Foundry PowerGen Robotics SoftLitho Display NEMS SensorNet AeroMEMS RFMEMS Microfluid BioMEMS 2000

1980

1990

The Silicon Material Family

Single crystalline silicon:
Bulk silicon by melt/crystallization Thin film silicon by epitaxy

Polycrystalline silicon: CVD Amorphous silicon: CVD Silicon nitride Silicon dioxide

Illinois - Strong Laboratory Support and Rich Tradition

Microelectronics Clean room
8000 ft2 clean room facility, top notch in the country Equipment capable of writing 10 nm (0.00000001 m) fine lines

ECE Department clean room (education) Materials research laboratory (MRL)

Materials characterization; microfabrication facility

Beckman Institute
Microscopy suite, computing and simulation

Bardeen and co-workers invented the semiconductor transistor

SEM of modern transistor circuitry

3D Features

Outline
Stories from the early days MEMS in the 1990s MEMS for the twenty first century Stories from the early days
Micro resonant gate transistor (Westinghouse Research, 1967) Micromachined gas chromatographer (Stanford, 1975) Micromachined pressure sensors (Petersen at IBM, 1970s) Micromachined ink jet nozzles (HP and others, 1985) Micro infra-red detector (Honeywell) Miniature chip coolers (Stanford 1978)
Gate Gate

Drain

Source Regular FET

Drain

Source

Resonant gate FET

1984 180

1987 145

1991 130

1993 90

1995 40

Ink Jet Printer

Drop weight (ng)

200 150 100 50 0 1980 S

Hewlett-Packard Photo

1985

1990 Year

1995

2000

ink

ink

1984 10 Number of Nozzles per pen 350 300 250 200 150 100 50 0 1980

1987 50

1991 55

1993 100

1995 300

Ink jet printer

1985

1990 Year

1995

2000

Micromachined Gyro Chip

Range: +/- 50-1000 o/sec Stability
0.002 o/sec short term 0.2 o/sec long term

Comparison with conventional Large scale gyro

Outline
Stories from the early days MEMS in the 1990s MEMS for the twenty first century Micro Inertial Sensors (accelerometers and gyro) Data storage RF communications Micro fluidics Biomedical applications (micro medical instruments) Displays Energy storage and generation

Accelerometers

Motorcycle security sensor

Hz

Analog Devices Accelerometer

Full range: 0-5g sensitivity: 200 mV/g resolution: 5 mg at 100 Hz noise floor: 0.5 mg/(Hz)1/2

Also, 10 million sold on 5/15/1998 by Motorola

BT Smart Quill

http://www.bt.com/innovation/exhibition /smartquill/index.htm

Digital Micro Mirrors

www.ti.com/dlp

TI Photos

Butterfly Wing Inspiration for display

Butterfly and mouth derives their vibrant color partially from structural optical interference and diffraction.

Digital paper
Reflectivity 80% Contrast ratio: 20:1 Viewing angle: +/- 60o Operating voltage: 5 v 1000 dpi resolution possible Silicon Light Machines

Iridigm Displays Photos www.iridigm.com SLM Photos

Micro Optical Systems

high-speed, low-loss, electrically controlled optical switches MxN switches 1xN switches add/drop switches

Optical MEMS Company

Adaptive microoptics
used on large earth-based telescopes to measure and compensate for rapidly fluctuating wavefront distortions which blur the images of objects viewed through the turbulent atmosphere

Weapon Safeguarding Sandia National Lab.

http://www.mdl.sandia.gov/Micromachine/

Surface Micromachined Gear Chains

Micro Air Vehicle and other DARPA Funded Efforts

Micro-machined Neuron Interfaces

Caltech Neuron Well

Utah Implantable Neuron Probe

Illinois Neuron Probe Array

It is a wireless world.
Wireless infrastructure Bluetooth, Wireless LAN Applications: wireless internet, smart building, smart highway, wireless sensor network, smart toys,

A low cost, high performance, small volume, power efficient front end is key to hardware success.

MEMS for Information Technology

Mechanical Support
DC actuation Voltage V

E1 C E3 E2

d2 d1
E3

Towards a real Dick Tracy Watch

Better Than the Dick Tracy Watch GPS Cellular Phone 30 GB memory True color display DC-200KHZ microphone Pressure sensor Pulse sensors Heart monitor Personal digital assistance Digital camera and movie Large screen projection display
Lucent Omni-directional Microphone

Wearable Enbedded Systems

Adidas 1 smart shoe

Outline
Stories from the early days MEMS in the 1990s MEMS for the twenty first century Research becomes interdisciplinary; field rapidly expanding to including many different expertise. Small, low cost, smart devices finding unprecedented applications
Military: sensor network for unattended battlefield monitoring Biology: cell sorting and manipulation Chemistry: micro chemical systems Medicine: micro surgical tools with smart sensors Homeland defense: distributed environmental sensors with wireless Aeronautics: smart skin for flow sensing Gaming and toys: sensors

Areas of Work related to Biology and Medicine

Biofluidics
active drug delivery chips cell transport and sorting assay storage and transportation fluidics monitoring
optical (fluorescence) magnetic

Tissue engineering
whole organ engineering for critical organ transplant
blood vessel, kidney, musculoskeletal

Medical applications
least intrusive blood vessel cleaning total health monitoring micromachined surgical tools cell cytometry biochemical sensing
total blood analysis

micro chemical reactors micro internal combustion engine ink jet printing and ejection micro rockets

Cell manipulation
transport across cell wall cell characteristics monitoring neuron prosthesis cell and tissue based sensors

Genetic analysis
DNA amplification DNA transportation and manipulation

Enabling Applications for Future

Early Detection of Cancer Cells in Bodily Fluid
detect 1 cell within a 10^6-10^7 conglomerate with a dirty fluid environment

Rapid and precise screen of gene sequence

identify within a matter of minutes gene sequence of 10-20 base pairs for cancer detection, biological warfare agent detection.

Target drug delivery system

trans-dermal and in-body drug delivery for maximizing the effective of medicine and reducing the amount of pain

Drug discovery and enzyme-protein interaction identification

identify the interaction between one particular protein to 10^6 enzyme sequence within the library to discover suitable drugs in fast, low cost fashion

Fantastic voyage and beyond

micromachined components that travel in blood streams to detect and cure disease.

Whole Blood Analysis at Home Nasdaq: STAT. Www.I-stat.com

Patient-side testing with disposable cartridge for 11 tests electrochemical sensors potentiometric (Na, K, Cl, urea, Ca, pH and CO2) amperometric (glucose, creatinine, oxygen) conductometric. Coagulation detection

viscometric endpoint detection

Needle without Pain

Georgia Tech

Cell Handling and Cell Transport

Transport individual embryos to stations for monitoring and/or manipulation.

Portable Cell Sorters for Medical Diagnosis

Quake, Caltech, APH

Get pictures from Human Genome project Genetic Materials

National Health Museum

DNA Array

High throughput gene sequence analysis. Quantify gene expression levels between samples of various biological stages for 1000s of gene simultaneously.

Electronics Control of Gene

Electronics Addressing
Electronics assisted hybridization
faster speed than passive

Serial probe DNA capture Electronics stringency control

removes unbound and unspecified DNA

Gene.COM - Intel of the next Century?

Gene sequence identification Detection of polymorphisms (variation)

Also visit Perlegen, an Affymetrix spin off.

Conventional Gel Electrophoresis

http://www.life.uiuc.edu/molbio/geldigest/electro.html

Mechanical DNA Separation

http://www.hgc.cornell.edu/frindex.htm

DNA samples of different lengths tagged with fluorescent marker moving through a mechanical artificial gel

A DNA separator consisting of a series of alternative deep and shallow regions. The DNA coils into a sphere in deep regions and then stretch into a linear polymer in the shallow regions. Longer strands moves faster than shorter ones.

Hybrid Biological entities and machine

Neurons resting on electrodes that actively stimulate neurons and record its vital signs.

Retina Prosthesis

Cochlea Implant for Hearing

Cooperating with Biology - RoboRoach

http://www.cae.wisc.edu/~sonic mem/ U. Michigan

Isao Shimoyama,Tokyo University

MEMS for Nanotechnology and NEMS

Prof. Michael Rukes, Caltech

Prof. Joe Lyding Group, UIUC

Applications: on-demand construction of materials; construction of tailor-made DNA and protein sequence.

Biological Muscle Actuator

Conclusion
Early MEMS: Industrial sensors, IC-derived devices MEMS in 1990
Interdisciplinary applications covering many and growing number of areas rapidly
information storage, automotive, communications (wired and wireless), aeronautics, space astronomy, power generation, military weapon smartness and sensing, entertainment (display, virtue reality), toy industry, computer periphery, building/architecture, neurological interfaces, chemistry and physics research.

Successful formula
high performance/price compared with conventional devices new market/starving market (ink jet printer, communications, bio analysis)

MEMS in next ten years

Continue branching into new areas
biology, chemical engineering, nanoengineering

Accelerated speed to commercialization