(IGHPERFORMANCE.

%-3DEVICES
FORSENSINGAPPLICATIONS

4HOMAS%RNST3EBATIEN(ENTZ*ULIEN!RCAMONE6INCENT!GACHE,AURENT$URAFFOURG)SSAM/UERGHI7ILLY

,UDURCZAK#ARINE,ADNER%RIC/LLIER0HILIPPE!NDREUCCI
%RIC#OLINET
AND0IERRE0UGET

#%! ,%4)-).!4%##AMPUS\RUEDESMARTYRS
'RENOBLE&RANCE
!0)8!NALYTICS


!BSTRACT .%-3 BASED SENSORS OPEN SEVERAL OPPORTUNITIES
LOCKEDLOOPONECANMEASURETHETEMPORALFREQUENCYSHIFTF
FORINTEGRATEDSOLUTIONSINEMERGINGDOMAINSASCHEMICALANALYSIS
AND THEREBY CALCULATE THE MASS OF SEVERAL OR EVEN INDIVIDUAL
ANDLIFESCIENCE7ITHCRITICALDIMENSIONSRANGINGBETWEENAND
MOLECULES
NMTHOSEDEVICESCANBEMADEATTHE6,3)SCALEPOSSIBLYCO
INTEGRATED WITH #-/3 AND ARE WELL SUITED FOR AUTONOMOUS
HIGHLY SENSITIVE OR DENSE SENSORS 3EVERAL APPLICATIONS WILL BE
PRESENTED AS COMPLEX GAS PORTABLE RECOGNITIONS SYSTEMS MASS
SPECTROMETRYORBIO SENSORS

4O REACH ULTIMATE MASS RESOLUTION SENSORS MUST BE

OPTIMIZED IN TERMS OF FREQUENCY STABILITY SUB PPM TO PPB
FREQUENCY FLUCTUATIONS  REVEALED BY THEIR !LLAN DEVIATION
PARAMETER WHICH STATISTICALLY QUANTIFIES THE FREQUENCY NOISE
WHEN THE FREQUENCY IS MEASURED AS A FUNCTION OF TIME 4HIS
PARAMETER IS INVERSELY PROPORTIONAL TO THE RESONATOR QUALITY
FACTOR4HIS TREND HIGHLIGHTSTHAT AN IMPROVEMENT OF THE 1
FACTOR REDUCES THE FREQUENCY NOISE MEASURED BY THE !LLAN
VARIANCE

+EYWORDSNANO ELECTROMECHANICAL SYSTEM .%-3  GAS SENSOR

MASSSPECTROMETRYNANOWIRESBIOSENSORS$INTEGRATION

)

).42/$5#4)/.

-ICRO ELECTRO MECHANICAL 3YSTEM -%-3 FIELD BENEFITED

FROM A PHENOMENAL GROWTH WITHIN THE LAST TWO DECADES BY
USING ADAPTING AND COMPLETING THE TECHNIQUES DEVELOPED FOR
MICROELECTRONICSIN A WIDE INTERDISCIPLINARY DOMAIN4HE LATER
INCLUDES MICROFABRICATION MECHANICS PACKAGING POWER
MANAGEMENTANDSIGNALPROCESSING

.ANOWIRE.%-3
4O SCALE THE DEVICES DIMENSIONS AND CONSEQUENTLY THEIR
MASSRESOLUTION WEDEMONSTRATEDTOP DOWNSILICONNANOWIRES
3I.7 TRANSDUCEDBYBOTHJUNCTION LESSFIELD EFFECTTRANSISTOR
&%4 AND THE PIEZORESISTIVE 0:2 EFFECT ;= &IG   4HE
SUSPENDED3I.7SWEREFEATURINGWIDTHSDOWNTONM4HIS
HAS BEEN ACHIEVED THANKS TO A  MM WAFER SCALE 6,3)
PROCESS FULLY AMENABLE TO MONOLITHIC #-/3 CO INTEGRATION
4HANKS TO THE VERY SMALL DIMENSIONS THE CONDUCTANCE OF THE
SILICON NANOWIRE CAN BE CONTROLLED BY A NEARBY ELECTROSTATIC
GATE "OTH THE JUNCTION LESS &%4 AND THE PREVIOUSLY
DEMONSTRATED0:2TRANSDUCTIONHAVEBEENPERFORMEDWITHTHE
SAME 3I.7 4HESE SELF TRANSDUCING SCHEMES HAVE SHOWN
SIMILAR SIGNAL TO BACKGROUND RATIOS AND THE 0:2 TRANSDUCTION
HASEXHIBITEDARELATIVELYHIGHEROUTPUTSIGNAL

2ECENTLYTHEENTRANCEINTHENANOSCALEWORLDOPENEDNEW
OPPORTUNITIESFORSUCHDEVICES;=)TISNOWPOSSIBLETODESIGN
MECHANICALDEVICESATTHESCALEOFMANYCHEMICALSPARTICLESOR
CELLS VIRUSES AND EVEN $.! STRANDS 4HE ASSOCIATED
INTERDISCIPLINARY .ANO %LECTRO -ECHANICAL 3YSTEM .%-3
RESEARCHISEVENWIDERTHATITUSEDTOBEFORTHECOMMONLYUSED
-%-3 DEVICES )T INCLUDES SURFACE CHEMISTRY OPTICS AND
BIOLOGYDEPENDINGONTHENANO SYSTEMWECONSIDER
)N THE FOLLOWING WE PROPOSE AN OVERVIEW OF .%-3
RESONATORS PRINCIPLES OF OPERATION AND SOME APPLICATIONS 7E
WILLALSODISCUSSTHEOPPORTUNITYOFCO INTEGRATIONWITH#-/3
TECHNOLOGIES;=
))

#ONSIDERING THE DEVICE EFFECTIVE MASS THE MEASURED

CHARACTERISTICS TRANSLATES INTO A SUB ZG  ZG    G MASS
RESOLUTION AT AMBIENT TEMPERATURE AND A FEW SECONDS
INTEGRATIONTIME

"!3)#02)#)0,%3

.%-3DEVICESCONSIDEREDINTHISPAPERARENANO FABRICATED
MECHANICAL RESONATORS 4HEIR FREQUENCY CAN BE TRACKED
ELECTRONICALLY 3UCH DEVICES COME IN A BROAD RANGE OF
GEOMETRIES AND HAVE BEEN USED FOR A VARIETY OF SENSING
APPLICATIONSINCLUDINGMASSDETECTION;=
4HEPRINCIPLEOFOPERATIONISTHEFOLLOWINGTHEMECHANICAL
RESONATORISELECTRONICALLYDRIVENATITSRESONANCEFREQUENCYF
7HENMOLECULESLANDONTHERESONATORITSMASS-ISCHANGED
BY A SMALL AMOUNT M !SSUMING M- THE MASS CHANGE
LINEARLY SHIFTS THE RESONATOR FREQUENCY BY F "Y TRACKING THE
RESONANT FREQUENCY OF THE .%-3 IN REAL TIME USING A PHASE

978-1-4673-7135-3/15/$31.00 2015 IEEE

&IGURE.ANOWIRERESONATORSA TOPVIEWB CROSSSECTION

31

))) '!3!..!,93)3

.%-3!RRAYS

4O ACHIEVE EXTREMELY LOW MASS RESOLUTION AND ENHANCE THE
SENSORSCAPTURESECTIONARRAYSUPTORESONATORSHAVEBEEN
DESIGNEDANDCHARACTERIZED&IGA 
4HE DESIGN OF EACH SENSOR CONSISTS OF TWO SUSPENDED
PIEZORESISTIVE P DOPED SILICON .7S CONNECTED TO A RIGID
ENOUGH LEVER A CANTILEVER IN A SYMMETRIC BRIDGE
CONFIGURATION 4HE LEVER IS ELECTROSTATICALLY ACTUATED WHICH
INDUCES HIGH AXIAL STRESS IN THE TWO PIEZORESISTIVE NANOWIRE
GAUGESTHANKSTOALARGELEVERARM&IGB 
%ACH .%-3 IS ADDRESSED BY A DIFFERENT FREQUENCY WITHIN A
SINGLELINEOFSENSORS&IGA ALLOWINGTHECREATIONOFDENSE
MATRIXES3UCHDEVICESPRESENTEXCELLENT3IGNALTO"ACKGROUND
2ATIOANDVERYGOODFREQUENCYSTABILITY;=!NOISEREDUCTION
ATSHORTINTEGRATIONTIMESBYAFACTORCLOSETO.WHERE.IS
THENUMBEROFRESONATORS HASBEENOBTAINEDBYAVERAGING ALL
THERESONATORS@SIGNAL4HEABILITYTOCONTROLARRAYSOF.%-3
WITH A SIMPLIFIED ROUTING AND A REDUCED NUMBER OF ELECTRICAL
CONNECTIONS WAS DEMONSTRATED AND THE GREAT POTENTIAL OF
.%-3 ARRAYS FOR GAS AND MASS SENSING APPLICATIONS WAS
HIGHLIGHTED
&URTHERMORE BASED ON EXPERIMENTAL RESULTS AND A DEDICATED
DEVELOPED MODEL THE IMPACT OF VARIOUS TECHNOLOGICAL
PARAMETERSFLUCTUATIONSONTHEPERFORMANCEOFSUCHFREQUENCY
ADDRESSED .%-3 ARRAYS WAS INVESTIGATED )T WAS SHOWN THAT
WITH STANDARD  MM EQUIPMENT AS MANY AS  .%-3
RESONATORSCANBEADDRESSEDINPARALLELWHENLIMITEDBYCRITICAL
DIMENSIONS#$ FLUCTUATIONSTHEQUALITYFACTOROFTHE.%-3
ANDTHEIRRESONANCEFREQUENCIES;=
4O ENHANCE THE NUMBER OF SENSORS BY ONE OR TWO ORDERS OF
MAGNITUDE OR ENHANCE THE RESOLUTION CO INTEGRATION WITH
#-/3WILLBENECESSARYANDDISCUSSEDINSECTION6

$ESIGNING AN INTEGRATED GAS ANALYZER PROVIDING BOTH HIGH

SELECTIVITY AND HIGH SENSITIVITY TO A BROAD PANEL OF GASES STILL
REMAINSAMAJORTECHNOLOGICALCHALLENGE)NTHEE NOSECONCEPT
;= THE ANALYZER ARCHITECTURE IS BASED ON A SENSOR ARRAY IN
WHICHEACHSENSORISFUNCTIONALIZEDDIFFERENTLYWITHASPECIFIC
LAYER EACH ONE TARGETING A SINGLE GAS (OWEVER IT TURNS OUT
EXPERIMENTALLYTHATTHISCONCEPTMAKESDIFFICULTESTIMATINGTHE
COMPOSITIONOFAMIXTUREEVENWITHFEWANALYTES;=
)NSTEAD WE PROPOSE TO DEPLOY A GAS CHROMATOGRAPH '#
INSTRUMENT PRINCIPLE THAT CAN BE MINIATURIZED USING SILICON
COMPONENTS&IG 4HE'#PROVIDESSELECTIVITYBYSEPARATING
INTIMEANDSPACETHEGASMIXTURECOMPONENTSWHILEDETECTORS
SEQUENTIALLY MEASURE THE ELUTION PEAKS AT THE '# OUTPUT
)NDEEDBOTH'#COLUMNANDDETECTORSCANBEFABRICATEDWITH
#-/3 COMPATIBLE 6,3) SILICON MICRO AND NANOFABRICATION
TECHNIQUES

&IGURE0RINCIPLEOFANINTEGRATEDGAZSENSORINCLUDINGGASMIXTUREINJECTION
SEPARATIONANDDETECTION;=

&IGURE&ULLYPORTABLESYSTEMUSINGTHEPRINCIPLEILLUSTRATEDIN&IG
3OURCE!0)8!NALYTICS

&IGUREA &REQUENCYADDRESSED.%-3RESONATORSB DETAILSOFTHE

SUSPENDEDRESONATORC INTERCONNECTIONS4HERESONATORUSEDHEREWITHA
CROSSBEAMCONFIGURATIONISOPTIMIZEDFORAHIGH3IGNALOVER.OISE2ATIO

!S DETECTORS .%-3 RESONATORS WERE SELECTED FOR THEIR

OUTSTANDING MASS SENSITIVITY AND MASS RESOLUTION ;= 7HEN
COATINGA.%-3WITHASENSITIVELAYERAGASADSORBEDONITS
SURFACE INCREASES THE RESONATOR MASS WHICH CAN BE ESTIMATED
THROUGH THE MEASUREMENT OF A NEGATIVE RESONANCE FREQUENCY
SHIFT
4HEINTEGRATEDSYSTEMTHATINCLUDESINJECTION'#AND.%-3
SENSORS IS FULLY PORTABLE &IG  AND FEATURES STATE OF THE ART
EXPERIMENTAL RESULTS IN TERMS OF LIMIT OF '# MEDIATED GAS
DETECTION!NEXAMPLEOFTRACKINGAMAJORSOURCEOFIN HOUSE
POLLUTION 6OLATILE /RGANIC #OMPOUNDS 6/#  IS GIVEN IN
&IG 

32

4HE MASS DEPOSITION IS PERFORMED IN THE DEPOSITION CHAMBER

OFASPUTTERING GASAGGREGATIONSETUPABLETOPRODUCEMETALLIC
CLUSTERS WITH TUNABLE DEPOSITION RATE AND DIAMETER RANGING
FROM  TO  NM IN THIS STUDY  4HE CLUSTER MASS DISTRIBUTION
CANBEMEASUREDBYBOTH4/& -3AND.%-3 -3

4HEOBTAINEDMASSRESOLUTIONISAFEWK$AVERYCLOSETOTHE
4/&SPECTROMETERRESOLUTIONINTHISHIGHMASSRANGE
!S OPPOSED TO 4/& -3 .%-3 ARE IDEALLY SUITED FOR ULTRA
HIGHMASSSPECIES-$A ARANGEINACCESSIBLETODAYFOR
CONVENTIONAL ION BASED -3 4HE ABILITY OF .%-3 -3 TO
MEASURE NEUTRAL SPECIES MAKES IT A TECHNOLOGY IDEALLY SUITED
FOR NATIVE -3 EXPERIMENTS TO STUDY FOR EXAMPLE INTACT
MACROMOLECULAR COMPLEXES WHOLE VIRUSES OR THERAPEUTIC
ANTIBODIES
&IGURE6OLATILE/RGANICCOMPOUNDDETECTIONSTHANKSTOANINTEGRATED
MODULE3OURCE!0)8!NALYTICS

6

")/3%.3).'

-%-3.%-3 RESONATORS HAVE ALSO BECOME A RELEVANT

ALTERNATIVE TO GOLD STANDARD TECHNIQUES FOR PARTICLE METROLOGY
IN FLUID $YNAMIC ,IGHT 3CATTERING FLOW CYTOMETRY  WITH
APPLICATIONS IN PHARMACEUTICAL BIOLOGICAL AND ENVIRONMENTAL
FIELDS
!RELEVANTPARADIGMINTRODUCEDBY%3TEMME;=CONSISTSIN
CONFININGAFLUIDICCHANNELINSIDEAMECHANICALOSCILLATOR4HE
OSCILLATOR VIBRATES IN A DRY ENVIRONMENT WHILE FLUID IS
DELIVERED INSIDE THE EMBEDDED CHANNEL WHICH SIGNIFICANTLY
REDUCES THE VISCOUS DAMPING AND OPTIMIZES THE SIGNAL OVER
NOISE RATIO 4HIS TECHNIQUE ENABLES PRECISE MASS DISTRIBUTION
MEASUREMENT WITH AN UNEQUALED SENSITIVITY DOWN TO THE
ATTOGRAM SCALE AND THE WEIGHING AND ACCURATE COUNTING OF
PARTICLESASSMALLASNM
3 2 -ANALIS AND COWORKERS WERE THEN ABLE TO MEASURE CELL
GROWTH IN FLUID;= AND WEIGHT NANOPARTICLES ;= USING
VACUUM PACKAGEDHOLLOWFLEXURALCANTILEVERS!(EIDARIAND
COWORKERS FOUND  FACTOR OF  USING FILLED ,AM MODE
MASS SENSOR IN AIR ;= WHILE -ANALIS TEAM FOUND FACTOR
AROUNDINVACUUMAND!LLANDEVIATIONRANGINGFROM
TOPARTSPERBILLIONPPB ATANAVERAGINGTIMEOFMS;=

7EREPORTIN;=&IG SQUAREORDISKPLATERESONATORSWITH
AN EMBEDDED MICROCHANNEL OPERATING IN ,AM MODE
CONFIGURATION "OTH ACTUATION AND READOUT RELY ON CAPACITIVE
COUPLING ACROSS LATERAL ELECTRODES /UR SENSORS DEMONSTRATED
IN ATMOSPHERIC CONDITIONS FACTORS UP TO  AND !LLAN
DEVIATION DOWN TO  PPB AT AN AVERAGING TIME OF  MS AND 
PPBATMS4HESENSORSVIBRATINGSTRUCTURECONSISTSINADISK
OR SQUARE SILICON PLATE FROM  TO  M WIDE SIMILARLY TO
;=WITHANEMBEDDEDMICROCHANNELETCHEDALONGITSEDGES
THROUGH WHICH THE FLUID AND PARTICLES CAN TRANSITTRAVEL 4WO
CAPACITIVEELECTRODESDRIVEANALTERNATIVEVOLTAGETOACTUATETHE
SENSOR AT ITS RESONANT FREQUENCY F TWO SENSING ELECTRODES
COLLECT THE MOTIONAL CURRENT ARISING FROM THE PLATE MOTION
7HENPARTICLESARETRAVELINGTHROUGHTHEDEVICETHEFREQUENCY
SHIFT F BETWEEN THE OUTPUT SIGNAL AND THE PLATES NATURAL
FREQUENCYALLOWSACCURATEWEIGHINGOFTHESEPARTICLES

3UCHPORTABLESYSTEMSAREOFFIRSTINTERESTFORINDUSTRY
ENVIRONMENTANDDEFENSE
)6 -!3330%#42/-%429
.ANO %LECTRO -ECHANICAL 3YSTEMS .%-3 BASED -ASS
3PECTROMETRY -3 HOLDS ALSO GREAT PROMISE FOR BIOLOGICAL
RESEARCHASWELLASBIOMEDICALAPPLICATIONS7HILEBOTTOM UP
DEVICESHAVERECENTLYDEMONSTRATEDYG RANGELIMITOFDETECTION
;= SINGLE PROTEIN .%-3 -3 ;= ;= HAS RECENTLY BEEN
REPORTED WITH SCALABLE TOP DOWN SILICON DEVICES 4HESE
DEVICESOPERATEINAHIGHMASSRANGEWHEREPARTICLESDISPLAYA
BROADMASSDISTRIBUTION4HECOMPARISONOF.%-3 -3WITHA
REFERENCE MEASUREMENT LIKE CONVENTIONAL ION BASED -3 IS
CRUCIALFORFUTUREAPPLICATIONSASTHEREISNO MASSSTANDARDIN
THIS RANGE ! .%-3 RESONATOR &IG  WAS INTRODUCED IN A
SETUP ALLOWING MASS SENSITIVITY CALIBRATION .%-3 -3
OPERATIONASWELLAS4IMEOF&LIGHT4/& -3

&IGURE4YPICALDOUBLYCLAMPEDRESONATORMLONG USEDFOR.%-3 -3

ALLOWINGFORTWO MODEOPERATION;=

33

FRONT ENDINTHESAMENMTHICKLAYERASTRANSISTORSCHANNELS
OFAN&$3/)TECHNOLOGY&IG 
!NOTHER PROMISING APPROACH FOR THE FUTURE IS TO TARGET NO
MODIFICATIONOFTHE#-/3LAYERBYINTRODUCINGAFULLYABOVE
)#APPROACH/NEPOTENTIALWAYTOACHIEVETHISISTHESO CALLED
$SEQUENTIALINTEGRATION;=AFTERTHESTANDARD#-/3BACK
END 4WO SOLUTIONS COULD BE ENVISAGED 4HE FIRST ONE COULD
USE CRYSTALLINE SILICON COUPLED WITH WAFER BONDING APPROACH
;= !NOTHER LOWER COST SOLUTION WOULD USE POLY SILICON AS
THE ACTIVE LAYER ;= POSSIBLY ACHIEVED WITH LASER ANNEALING
ONAMORPHOUSSILICON/URRESULTSONPOLY SILICON.%-3WITH
SUB NM CRITICAL DIMENSIONS DEMONSTRATE THIS APPROACH AS
VERY COMPETITIVE FOR LOW COST APPLICATIONS WITH EXCELLENT
PERFORMANCE WHEN COMPARED TO CRYSTALLINE SILICON )N
PARTICULARCOMPARABLEQUALITYFACTORSINTHEAIRIN
VACUUM ANDFREQUENCYSTABILITIESWEREDEMONSTRATEDONPOLY
SILICON;=

-OTIONAL
CURRENT

)NPUT
VOLTAGE
%LECTRICAL
CONNECTIONS
&,5)$
&,5)$

MM

$RIVINGELECTRODES

3ENSINGELECTRODES
&LUIDPARTICLES
CHIPSENSORS

&IGURE  0HOTOGRAPH OF ONE CHIP AND SCHEMATIC VIEW OF ONE SQUARE PLATE
SENSOR;=

6) 4/7!2$#/ ).4%'2!4)/.7)4(#-/3

4HOSE EMERGING APPLICATIONS TEND TO INVOLVE HIGH DENSITY
.%-3 ARRAYS WITH A LARGE NUMBER OF ELECTRICAL CONTACTS PER
DEVICE MAKING THEIR INDIVIDUAL ADDRESSING COMPLEX
-OREOVER THE ELECTROMECHANICAL TRANSDUCTION SCHEME OF
DEVICES WITH SUCH ULTIMATE SIZE AND FREQUENCY RANGE 
-(Z ISCRITICAL
)N THIS CONTEXT MONOLITHIC .%-3 #-/3 INTEGRATION SEEMS
THE MOST ADEQUATE WAY TO OVERCOME THOSE CHALLENGES
4RACKINGINREALTIMETHERESONANCEFREQUENCYOFTHOUSANDSOF
.%-3 DEPLOYED IN ARRAYS WILL REQUIRE AN INDIVIDUAL
ADDRESSINGONLYENABLEDBYMONOLITHICINTEGRATION)NPRACTICE
SUCH ARRAYS WILL PROBABLY CONSIST OF THOUSANDS OF PIXELS
CONTAINING A .%-3 #-/3 CLOSE LOOP OSCILLATOR UNDER THE
FORMOFA0,,ORASELF OSCILLATORINCLUDINGTHE.%-3ANDITS
AMPLIFIER
-ONOLITHIC INTEGRATION OF .%-3 RESONATORS WITH A STANDARD
#-/3 TECHNOLOGY HAS BEEN DEMONSTRATED IN THE LAST DECADE
MAINLY THROUGH THREE APPROACHES USING &IG   I THE LAST
METAL LAYER OF BACK END LEVELS AS .%-3 STRUCTURAL LAYER
;= II THE MIDDLE END POLY3I LAYERS ;= STANDARDLY
USEDASCAPACITORSIII .%-3ATTHEFRONT ENDUSINGTHETOP
SINGLE CRYSTAL3ILAYEROF3/)WAFERSORTHEWHOLE-/3STACK
; =
4HE TREND IS ON CONTINUOUSLY MINIATURIZING THE .%-3  AND
UNLIKE -%-3 #-/3 DEVICES THE NOVELTY IS THAT .%-3 ARE
CONVERGING TOWARDS ADVANCED #-/3 IN TERMS OF PROCESSES
AND DIMENSIONS FOR INSTANCE WE ACHIEVED THE SMALLEST
MONOLITHIC .%-3 TO OUR KNOWLEDGE ;= INTEGRATED AT THE

&IGURE3CHEMATICOFTHEDIFFERENTPOSSIBLELEVELSFOR.%-3INTEGRATION
INA#-/3CIRCUIT;=

&IGURE3INGLE CRYSTAL3IPIEZORESISTIVE.%-3&RONT END#-/3INTEGRATION

ANDPOST #-/3RELEASE WITH#-/3&$3/);=

6)) #/.#,53)/.

.%-3 BASED SENSORS FEATURE OUTSTANDING PERFORMANCES FOR
ULTRA LOW MASS DETECTION ;= 4HEY ARE INTRINSICALLY WELL
SUITED FOR AUTONOMOUS HIGHLY SENSITIVE OR DENSE SENSORS IN
APPLICATIONS LIKE GAS PORTABLE RECOGNITIONS SYSTEMS MASS
SPECTROSCOPY OR BIO SENSORS .%-3 #-/3 CO INTEGRATION
INCREASES FURTHER MASS RESOLUTION AND WILL BE NEEDED WHEN
THOUSANDSOFSENSINGDEVICESAREREQUIREDFORINSTANCEINMASS
SPECTROMETRY FOR INCREASED CAPTURE AREA AND REAL TIME
MONITORING

34

;= 3 /LCUM ET AL h7EIGHING NANOPARTICLES IN SOLUTION AT THE ATTOGRAM
SCALEv0ROC.ATL!CAD3CI53!VOLNOPPn
;= ! (EIDARI ET ALh(IGH SENSITIVE DIELECTRIC FILLED ,AM MODE MASS
SENSORv3ENSORS!CTUATORS!0HYS
;= #(ADJIETALh(OLLOW,AMMODE-%-3MASSSENSORWITH00"
RANDGE STABILITY FOR PARTICULES COUNTING AND WEIGHING IN FLUIDv 
4RANSDUCERS
;= * % 9 ,EE ET AL h,OW LOSS (& BAND 3/) WINE GLASS BULK MODE
CAPACITIVESQUARE PLATERESONATORv*-ICROMECH-ICROENG
;= *6ERDETALh-ONOLITHIC#-/3-%-3/SCILLATOR#IRCUITFOR3ENSING
IN THE !TTOGRAM 2ANGEv )%%% %LEC $EV ,ETT VOL  N PP 

;= *, ,OPEZ ET AL )NTEGRATION OF 2& -%-3 RESONATORS ON
SUBMICROMETRIC COMMERCIAL #-/3 TECHNOLOGIES * OF -ICROMECH
-ICROENG
;= * 6ERD ET AL ! 6 #-/3 -%-3 OSCILLATOR IN M #-/3
TECHNOLOGY0ROC)%%%4RANSDUCERSPP 
;= -+ :ALALUTDINOV ET AL h#-/3 )NTEGRATED 2& -%-3 2ESONATORSv
)%%% * -ICROELECTROMECHANICAL 3YSTEMSVOL  N PP  

;= % /LLIER ET AL h5LTRA SCALED HIGH FREQUENCY SINGLE CRYSTAL 3I .%-3
RESONATORS AND THEIR FRONT END CO INTEGRATION WITH #-/3 FOR HIGH
SENSITIVITYAPPLICATIONSv0ROC)%%%-%-3PP 
;= 4 %RNST ET AL h(IGHPERFORMANCE MINIATURIZED .%-3 SENSORS 4OWARD
CO INTEGRATIONWITH#-/3v0ROC)%%%$2#PP 
;= *!RCAMONEETALh.ANOSYSTEMSMONOLITHICALLYINTEGRATEDWITH#-/3
EMERGINGAPPLICATIONSANDTECHNOLOGIESv)%$-
;= 0 "ATUDE ET AL h $ 3EQUENTIAL )NTEGRATION ! +EY %NABLING
4ECHNOLOGY FOR (ETEROGENEOUS #O )NTEGRATION OF .EW &UNCTION 7ITH
#-/3v)%%%*%34#!3VOLNPP 
;= ) /UERGHI ET AL h(IGH PERFORMANCE POLYSILICON NANOWIRE .%-3 FOR
#-/3EMBEDDEDNANOSENSORSv)%$-
;= ,$URAFFOURGETALh.ANOELECTROMECHANICAL3YSTEMSv7ILEY

!#+./7,%$'-%.4
4HEAUTHORSACKNOWLEDGETHESUPPORTFROM!.2#!2./4
FUNDINGANDTHE%UROPEAN2ESEARCH#OUNCIL
2%&%2%.#%3
;= - ,I ET AL h5LTRA SENSITIVE .%-3 BASED CANTILEVERS FOR SENSING
SCANNED PROBE AND VERY HIGH FREQUENCY APPLICATIONSv .ATURE
.ANOTECHNOLOGYn
;= 4 %RNST ET AL  h.OVEL 3I BASED NANOWIRE DEVICES  7ILL THEY SERVE
ULTIMATE -/3&%4S SCALING OR ULTIMATE HYBRID INTEGRATIONv )%$-

;= % -ILE ET AL h)N PLANE NANOELECTROMECHANICAL RESONATORS BASED ON
SILICONNANOWIREPIEZORESISTIVEDETECTIONv.ANOTECHNOLOGY

;= ! +OUMELA ET AL (IGH FREQUENCY TOP DOWN JUNCTION LESS SILICON
NANOWIRERESONATORS.ANOTECHNOLOGY
;= % 3AGE ET AL &REQUENCY ADDRESSED .%-3 ARRAYS FOR MASS AND GAS
SENSINGAPPLICATIONS3OLID 3TATE3ENSORS!CTUATORSAND-ICROSYSTEMS
4RANSDUCERS%UROSENSORS886))PP
;= /-ARTINETAL)MPACTOFPROCESSVARIABILITYONAFREQUENCY ADDRESSED
.%-3ARRAYSENSORUSEDFORGRAVIMETRICDETECT%33$%2#PP 

;= ! 7ILSON ET AL h!PPLICATIONS AND !DVANCES IN %LECTRONIC .OSE
4ECHNOLOGIESv3ENSORS  
;= # *IN ET AL h,IMITS OF 2ECOGNITION FOR "INARY AND 4ERNARY 6APOR
-IXTURES $ETERMINED WITH -ULTITRANSDUCER !RRAYSv !NALYTICAL
#HEMISTRYPP 
;= * !RCAMONE ET AL h6,3) SILICON MULTI GAS ANALYZER COUPLING GAS
CHROMATOGRAPHYAND.%-3DETECTORSv)%$-
;= * #HASTE ET AL h! NANOMECHANICAL MASS SENSOR WITH YOCTOGRAM
RESOLUTIONv.ATURE.ANOTECHNOLOGYVOLPP 
;= - 3 (ANAY ET AL h4OWARDS SINGLE MOLECULE NANOMECHANICAL MASS
SPECTROMETRYv.ATURE.ANOTECHNOLOGYVOLPP 
;= %3AGEETALh.EUTRALPARTICLEMASSSPECTROMETRYWITHNANOMECHANICAL
SYSTEMSv.ATURE#OMMUNICATIONS
;= 3TEMME ET AL -EASURING ,IQUID $ENSITY WITH A 4UNING &ORK
4RANSDUCER)%%%4RANS)NSTRUM-EASVOLPPn
;= 4 0 "URG ET AL h7EIGHING OF BIOMOLECULES SINGLE CELLS AND SINGLE
NANOPARTICLESINFLUIDv.ATUREPP 

35