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The design and control of a jetting dispenser for semiconductor electronic packaging driven by

a piezostack and a flexible beam

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2008 Smart Mater. Struct. 17 065028

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IOP PUBLISHING SMART MATERIALS AND STRUCTURES
Smart Mater. Struct. 17 (2008) 065028 (12pp) doi:10.1088/0964-1726/17/6/065028

The design and control of a jetting

dispenser for semiconductor electronic
packaging driven by a piezostack and a
flexible beam
Quoc-Hung Nguyen, Seung-Bok Choi1 and Jae-Do Kim
Department of Mechanical Engineering, Inha University, Incheon 402-751, Korea

E-mail: seungbok@inha.ac.kr

Received 6 June 2008, in final form 16 October 2008

Published 6 November 2008
Online at stacks.iop.org/SMS/17/065028

Abstract
This paper presents the performance characteristics of a new type of jetting dispenser which can
be applicable for modern semiconductor packaging processes. The proposed jetting dispenser is
driven by both a piezostack actuator and a flexible beam mechanism. After describing the
geometric configuration and operational principle of the dispenser, a mathematical model of the
system is derived by considering the dynamic behaviors of structural parts such as the
piezostack, the flexible beam, the needle structure, and the adhesive fluid dynamics. In the
modeling, a lumped parameter method is employed and the governing equation of the whole
dispenser is then formulated by integrating the structural model with the fluid model. Based on
the proposed model, significant structural components of the dispenser such as the piezostack,
the flexible beam, and the actuating spring are designed in order to achieve operational
requirements (needle motion amplitude: up to 0.4 mm; operating frequency: up to 700 Hz).
Subsequently, dispensing performances such as the dispensing dot size and flow rate are
experimentally evaluated. In addition, a control algorithm is designed and empirically realized
to demonstrate some benefits of the proposed jetting dispenser such as accurate controllability
of dispensing amount.
(Some figures in this article are in colour only in the electronic version)

1. Introduction these approaches are classified into four types: timepressure,

In recent years, dispensing systems have been widely
used in many industrial applications such as electronics
assembly [13], micro-electro-mechanical systems (MEMS)
assembly [4], and fabrication of soft tissue engineering
scaffolds [5] to deliver fluid material in a precisely controlled
manner. In particular, in the semiconductor industry, the
dispensing system has played an essential role in integrated
circuit (IC) encapsulation and surface mount technology in
order to protect the IC chip from the external environment
and prevent its breaking away. Several dispensing approaches
have already been developed and successfully implemented in
semiconductor electronic packaging applications. Essentially,
1 Author to whom any correspondence should be addressed. http://www.
ssslab.com.
rotary-screw, positive displacement, and jetting types [6].
Among these the first three approaches belong to the contact-
based dispensing technique in which the dispenser nozzle is
required to make contact with a substrate or printed circuit
board (PCB) via dispensed adhesive during the dispensing
process. In the contact-based dispensing method, repeatable
and good quality dots require the dispensing gap (the
gap between the needle and the substrate or PCB) to be
the same from dispense to dispense. Maintaining such
a consistent dispensing gap requires a positioning system
that can accurately move the nozzle up and down during
the dispensing process. Consequently, the cycle time is
increased and the process is complicated. In order to
remedy the limitations of contact-based dispensers, a jetting
dispenser has been proposed based on a non-contact dispensing

0964-1726/08/065028+12$30.00 1 2008 IOP Publishing Ltd Printed in the UK

Smart Mater. Struct. 17 (2008) 065028 Q-H Nguyen et al

technique [7]. The jetting type is considered as the most

advanced dispensing technology and it is widely used in IC
encapsulation these days.
In modern semiconductor technology, the packaging
processes have become increasingly dense. For example,
the flip-chip requires a more advanced dispensing system
to dispense micro-volumes of adhesive at high flow rate.
In order to reach this requirement, several new types of
jetting dispensers driven by piezoelectric actuators have been
developed [811]. In these previous studies, the displacement
of the piezoelectric actuator is magnified via a hydraulic
magnification unit to such a value (0.30.5 mm) that can
make dispensing the adhesives possible. Even though these
types of jetting dispensers have several advantages such as
accurate flow rate controllability compared with conventional
jetting dispenser, there are still some limitations to be resolved.
Because rubber membranes are used to enclose the hydraulic
magnification chamber, the maximum operation frequency of
the dispensers is limited (500 Hz). The short lifetime of these
membranes and o-rings at high frequency is also a challenge.
Moreover, these piezostack driven dispensers are normally
open. Thus, the adhesive path from the syringe to the nozzle
is open when the applied voltage is off. This may cause an Figure 1. Configuration of the proposed jetting dispenser.
unwanted leak out of adhesive, especially for low viscosity
adhesive. In addition, the complexity of the dispensers due to
the hydraulic magnification unit which results in high cost of to 700 Hz). Subsequently, dispensing performances such as
manufacturing and maintenance is another issue to be carefully the dispensing dot size and flow rate are evaluated through
considered. both simulation and experiment. In addition, a discrete PID
Consequently, the main contribution of this work is to control algorithm is designed and implemented to demonstrate
develop a new type of close jetting dispenser driven by accurate controllability of the dispensing amount at various
a piezostack, which can operate durably at high frequency flow rates.
(significantly greater than 500 Hz). In addition, the design
simplicity of the dispensing mechanism is also taken into 2. Configuration and working principle
account. In order to achieve this goal, a flexible beam
mechanism is employed to magnify the output displacement Figure 1 shows a schematic configuration of the proposed
of the driving piezostack. Via a flexible beam mechanism, jetting dispenser featuring a piezostack and a flexible beam.
the amplitude of a needle motion is amplified to such a As shown in the figure, the piezostack functions as an actuator
value that can make possible dispensing a medium or high to make a deflection of the beam which magnifies the motion
viscosity adhesive. By designing the flexible beam with high of the needle part connected to the end of the beam. The
resonant frequency, the dispenser can operate at a frequency needle part consists of a transmission rod which is connected
much higher than that of conventional jetting dispensers. with the dispensing needle (ball-needle) via a screw connector.
Therefore, it is expected that the dispenser can provide very The rod is kept in contact with the beam by a compressive
small dispensing dot size at high dispensing flow rate, which force from the actuating spring which is placed on the spring
is absolutely required in modern semiconductor packaging base. The compressive force can be adjusted by adjusting the
processes. After describing the geometric configuration and position of the spring base. When a drive voltage is applied
operational principle of the proposed jetting dispenser, a to the piezostack, the displacement from the piezostack causes
mathematical model of the system is derived by considering the a backward motion of the needle that initiates the filling stage
dynamic behaviors of structural parts such as the piezostack, of a jetting cycle. In the filling stage, the pressurized adhesive
the flexible beam, the needle part, and the adhesive fluid in the dispensing chamber flows through the seat-annular duct
dynamics. In the modeling, a lumped parameter method (the annular duct between the needle and the seat) to fill in the
is applied to model both the structural part and the fluid void left by the needle displacement.
part. The governing equation of the whole dispenser is The forward motion of the needle is actuated by the
then formulated in matrix form by integrating the structural compressive spring that initiates the dispensing stage of the
model with the fluid model. Based on the proposed model, jetting cycle. In the dispensing stage, the needle pushes the
significant structural components of the dispenser such as the adhesive materials in the ball-seat chamber to flow out of the
piezostack, the flexible beam, and the actuating spring are nozzle. The flow rate in the nozzle depends on the velocity and
designed in order to achieve operational requirements (needle position of the needle. When the needle approaches the ball-
motion amplitude: up to 0.4 mm; operating frequency: up seat, the force due to acceleration breaks the stream of adhesive

2
Smart Mater. Struct. 17 (2008) 065028 Q-H Nguyen et al

to form dots striking the substrate. It is noted that, during 

i
the dispensing stage, a high pressure is built in the ball-seat + (i j )l2m 2 y j + i k2l2 = 0;
chamber which causes a back flow from the ball-seat chamber j =n 1 +1

to the dispensing chamber. Subsequently, a periodic driving (i = n 1 + 1 n 1 + n 2 ) (2b )

voltage results in a periodic motion of the needle which in turn Fn [L 1 + L 2 + (i n 1 n 2 0.5)]l3
causes the adhesive in the dispensing chamber to be dispensed FP [L 2 + (i n 2 n 1 0.5)l3 ] + i k3l3
through the nozzle in the form of continuous dots. During n1
the dispensing process, the adhesive material is constantly + [(n 1 j + 0.5)l1 + L 2 + (i n 1 n 2 0.5)l3 ]
pressurized at the syringe to ensure a constant flow throughout j =1
the fluid path of the dispenser and the adhesive temperature is 
i
controlled by a temperature control unit to achieve optimal and m 1 y j + (i j )l3m 3 y j
consistent viscosity. j =n 1 +n 2 +1
n
1 +n 2

+ [(n 1 + n 2 j + 0.5)l2
3. Dynamic modeling j =n 1 +1
+ (i n 1 n 2 0.5)l3 ]m 2 y j = 0;
The proposed dispenser is a multiphysics system of interacting
(i = n 1 + n 2 + 1 n 1 + n 2 + n 3 ). (2c)
fluids and structures. In this study, a lumped parameter
modeling method is adopted to describe the dynamic behavior In the above, L 1 , L 2 , and L 3 are the lengths of the stiff,
of the structural parts (the piezostack, the flexible beam, and the middle, and the slender parts, respectively. n 1 , n 2 , and
the needle part) as well as the fluid part (adhesive flows). n 3 are the number of lumps of the stiff, the middle, and the
First, the dynamic modeling of the structural parts is performed slender parts, respectively. l1 , l2 , and l3 are, respectively, the
considering dynamic behaviors of the piezostack, the flexible base lengths of each full triangle of the stiff, the middle, and
beam, and the needle part. The dynamics of the piezostack can the slender parts, lk = L k /n k (i = 1, 2, 3). k1 , k2 , and k3
are the stiffness constants of each lump of the stiff, the middle,
be mathematically expressed as follows:
and the slender parts, respectively. m 1 , m 2 , and m 3 are the
lump masses of the stiff, the middle, and the slender parts,
(m ep + m c ) yp + bp yp + kp yp = kp yp0 V Fp (1)
respectively.  j is the net deflection of the j th lump (a positive
where m ep = m p /3 is the dynamic effective mass of the value of  j reflects an elongation of the spring), and y j is the
neutral axis deflection of the beam at the midpoint of the j th
piezostack. m p and m c are the mass of the piezostack and the
lump. It is assumed that the geometric parameters and material
mass of the contacting cap, respectively. bp , kp , and yp are the
properties of each part of the above beam are constants; thus
damping coefficient, the stiffness, and the displacement of the
one has
piezostack, respectively. Fp is the force acting on the flexible
beam from the piezostack. V is the voltage applied to the m k = Ak lk ; kk = E Ik /lk3 (k = 1, 2, 3)
piezostack and yp0 is the free displacement of the piezostack
due to a unit of the applied voltage. where and E are the density and Youngs modulus of the
In order to model the forced response of the beam, a beam material, respectively. Ik and Ak are inertia moments and
lumped parameter method is employed. Figure 2(a) shows a cross-sectional areas of the i th part of the beam, respectively.
simplified structure of the flexible beam. The beam is fixed at The net deflection i relates to the neutral axis deflection yi as
one end and consists of three parts: the slender, the middle, follows:
and the stiff parts. The two forces acting on the beam are the i = y i1 2 yi + yi+1
force from the piezostack ( FP ) and the force from the needle (i = 1, n 1 , n 1 + 1, n 1 + n 2 , n 1 + n 2 + 1);
part ( Fn ). It is noted that, in order to reduce the computation
load, the first part of the beam is assumed to be fixed and is  1 = 2 y0 3 y1 + y2 ;
not included in the simplified structure. This is reasonable  
2l2 2l1
because this part is very stiff and is clamped to the body. Using n 1 = yn 1 1 3 yn 1 + yn +1 ;
l1 + l2 l1 + l2 1
the lumped parameter method proposed by Irvin [12], the free  
body diagram of the beam is shown in figure 2(b). From the 2l2 2l1
n 1 +1 = yn 3 yn 1 +1 + yn 1 +2 ;
free body diagram, the following moment equations can be l1 + l2 1 l1 + l2
  (3)
obtained: 2l3
 n 1 +n 2 = yn 1 +n 2 1 3 yn 1 +n 2
i
l2 + l3
Fn (i 0.5)l1 + i k1l1 + (i j )l1m 1 y j = 0;
j =1 2l2
+ yn +n +1 ;
(i = 1 n 1 ) (2a ) l2 + l3 1 2
 
Fn [L 1 + (i n 1 0.5)l2 ] + FP (i n 1 0.5)l2 2l3 2l2
n 1 +n 2 +1 = yn 1 +n 2 3 yn 1 +n 2 +1
n1
l2 + l3 l2 + l3
+ [(n 1 j + 0.5)l1 + (i n 1 0.5)l2 ]m 1 y j
j =1 + yn 1 +n 2 +2 .

3
Smart Mater. Struct. 17 (2008) 065028 Q-H Nguyen et al

Figure 2. Lumped parameter model of the flexible beam.

Figure 3. Lumped parameter model for the needle and the fluid part.

It is noted that the beam is clamped at one end; then from
the free body diagram one has yn 1 +n 2 +n 3 = 0. If the beam
is excited by a harmonic force whose frequency is , the
term yi in the above equations can be replaced by 2 yi ,
which results in equivalent simultaneous linear equations of
the beam. Thus far, we have developed (n 1 + n 2 + n 3 )
simultaneous equations for the beam. These equations can be
integrated with dynamic equations of the piezostack and the
needle part to provide structural governing equations of the
dispenser. It is also remarked that by assuming the piezostack
and the needle always contact the beam (this assumption is true
when the operating frequency is significantly lower than the
resonance frequency of the beam and the needle part), one has
y l1 +yn 1 l2
yp = n1 +l11 +l2
; yn = y0 , where yn is the needle displacement
obtained from the dynamics of the needle.
Figure 3(a) shows a schematic diagram of the needle part
integrating with the dispensing fluid part of the dispenser.
In the fluid part, the behaviors of the adhesive in the ball-
seat chamber ( f0 ), the dispensing flow in the nozzle ( f 1 ),
the back/filling flow in the seat-annular duct ( f 2 ), the flow
in dispensing chamber ( f3 ), and the flow in the connecting
pipe ( f4 ) are considered. In this study, an equivalent Bingham
model is used to express the rheological behavior of the
adhesive. Based on the analogy between a fluid system and
a mechanical system, a lumped parameter model is employed
to express the dynamic behavior of the fluid part. In the
lumped parameter model, the fluid system is divided into lumps
with lumped masses and average parameters such as velocity
and pressure. The system elements are obtained by applying
conservation of mass and Newtons law to the lumps of the

4
Smart Mater. Struct. 17 (2008) 065028
fluid. This method was first proposed by Doebelin [13] for a
Newtonian fluid in a pipe. Hung et al [8] developed lumped
parameter models for Bingham fluid flow in a circular pipe and
axial Couette flow in an annular duct, and successfully applied
them in modeling a jetting dispensing process. Figure 3(b)
shows the equivalent lumped model diagram of the needle part
and the fluid part. Noteworthily, in the lumped model, the
fluid compressibility is represented via spring elements, the
fluid inertia effect is represented via mass elements, and the
viscous shear force is represented by damping elements. From
the diagram, the dynamic equation of the needle part can be
mathematically expressed by
m np yn + bnp yn + ks yn = Fn FS0 (4)
where m np is the mass of the needle part including the transition
rod, the connector and the needle. bnp is the damping
coefficient of the needle part. ks is the stiffness of the actuating
spring. yn is the displacement of the needle. FS0 is the pre-
stressed force of the spring. The dynamic equations of the
adhesive flows can also be obtained from the lumped model
diagram as follows:
(m f 0 )x f 0 + k f 0 (x f 0 x ef0 ) = 0 (5a )
k f 0 (x f 0 x ef0 ) = 0 (5b )
m f 11 x f 11 + b f 11 x f 11 + k f 11 (x f 11 x f 12 ) = F,11
m f 12 x f 12 + b f 12 x f 12 k f 11 (x f 11 x f 12 )
+ k f 12 (x f 12 x f 13 ) = F,12
(5c)
m f 1 N x f 1 N + b f 1 N x f 1 N k f 1 N 1 (x f 1 N 1 x f 1 N )
= F,1 N
m f 21 x f 21 + b f 21 x f 21 + k f 21 (x f 21 x f 22 )
+ f v,21 yn = P A f 2 F,21
m f 22 x f 22 + b f 22 x f 22 k f 21 (x f 21 x f 22 )
+ k f 22 (x f 22 x f 23 ) + fv,22 yn = F,21 (5d )
m f 2 N x f 2 N + b f 2 N x f 2 N k f 2 N 1 (x f 2 N 1 x f 2 N )
+ k f 2 N (x f 2 N x ef2 ) + f v,2 N yn = F,2 N
k f 2 N (x f 2 N x ef2 ) = 0 (5e)
m f 31 x f 31 + b f 31 x f 31 + k f 31 (x f 31 x f 32 ) + f v,31 yn
= F,31
m f 32 x f 32 + b f 32 x f 32 k f 31 (x f 31 x f 32 )
+ k f 32 (x f 32 x f 33 ) + fv,32 yn = F,32 (5 f )
the initial value of the distance between the ball-needle and the
m f 3 N x f 3 N + b f 3 N x f 3 N k f 3 N 1 (x f 3 N 1 x f 3 N )
+ k f 3 N (x f 3 N x ef3 ) + f v,3 N yn = F,3 N
k f 3 N (x f 3 N x ef3 ) = 0 (5g )
Q-H Nguyen et al
m f 41 x f 41 + b f 41 x f 41 + k f 41 (x f 41 x f 42 ) = F,41
m f 42 x f 42 + b f 42 x f 42 k f 41 (x f 41 x f 42 )
+ k f 42 (x f 42 x f 43 ) = F,42
(5h )
m f 4 N x f 4 N + b f 4 N x f 4 N
k f 4 N 1 (x f 4 N 1 x f 4 N ) = PSy A f 4 F,4 N .
In the above, equations (5b ), (5e), and (5g ) are the
additional equilibrium equations of the massless lumps
x ef0 , x ef2 , and x ef3 , respectively. m f 0 and k f 0 are the analogous
mass and stiffness of the adhesive in the ball-seat chamber.
m f 1i , b f 1i , k f 1i , m f 2i , b f 2i , k f 2i , m f 3i , b f 3i , k f 3 , m f 4i , b f 4i ,
and k f 4i are the analogous mass, damping, and stiffness of the
i th lumps of the adhesive in the nozzle, the seat-annular duct,
the dispensing chamber, and the connecting pipe, respectively.
x f 1i , x f 2i , x f 3i , and x f 4i are the displacements of the i th
lumps of the adhesive in the nozzle, the seat-annular duct,
the dispensing chamber, and the connecting pipe, respectively.
An , A f 1 , A f 2 , A f 3 , and A f 4 are the effective cross-sectional
areas of the needle, the nozzle, the seat-annular duct, the
dispensing chamber, and the connecting pipe, respectively.
PSy is the pressure at the syringe. F,1i , F,2i , F,3i , and
F,4i are the additional forces due to the yield stress of the
adhesive. f v,2i and f v,3i are the frictional coefficients due to
the needle motion. x ef0 , x ef2 , and x ef3 are the displacements
of the adhesive at the exits of the ball-seat chamber, the seat-
annular duct, and the dispensing chamber, respectively. P is
the pressure drop due to flow contraction and expansion at the
needle end, which can be calculated as follows:
1 A2f 2
P = C Re CE 2 x 2f 2 . (6)
2 Acon
The local loss factor of the back/filling flow due to the
contraction and expansion, CE , can be calculated as follows:
 3/4  
Acon 2
1 1 Acon
+ 1
2 An Af2
when x f 2  0 (back flow)
CE =     (7)
1 Acon 3/4 Acon 2
1 + 1
2 Af2 An
when x f 2  0 (filling flow).
In the above, is the density of the adhesive fluid, and C Re is
the empirical correction factor which depends on the Reynolds
number of the flow at the contraction section. Acon is the area of
the contraction section, which varies according to the position
of the needle. Acon is calculated by
Acon = 2 Rcon ( + yn ) (8)
where Rcon is the radius at the contraction section, and is
ball-seat ( = 0).
The analogous stiffness, damping, and mass of the i th
lump of adhesive flow in the nozzle ( f1 ), the seat-annular duct
( f 2 ), the dispensing chamber ( f 3 ), and the connecting pipe
5
Smart Mater. Struct. 17 (2008) 065028 Q-H Nguyen et al

The above relations can be expressed in matrix form as follows:

X = T X (11)

where X = [yn , x f 1 x f 1 N , x f 21 x f 2 N , x f 31 x f 3 N ,
x f 41 x f 4 N ]T is the new state vector; T is the transform
matrix, which is also given in the appendix.
Using the relation (11), equation (9) can be rewritten in
terms of the transformed states as follows:

M X + B X + K X = F (12)

where M = TT MT, B = TT BT, K = TT KT, F = TT F .

Figure 4. Block diagram for computer simulation code. The dynamic behavior of the whole dispenser can be
obtained by combining equations (1), (2) and (12). Figure 4
shows the block diagram of the simulation code for the
( f 4 ), and the frictional coefficients due to the needle motion proposed dispenser. The simulation code consists of the
( f v,2i , fv,3i ) are calculated as follows [8]: dynamic model of the piezostack, the behavior of the flexible
beam, and the integrated model of the needle part and the fluid
A f1B part. From the input voltage and the piezostack displacement
k f 1i = ; b f 1i = 8l f 1i ; m i = A f 1i l f 1i
l f 1i ( yp ) obtained from the beam dynamics, the force acting on
A f 2B the beam from the piezostack ( Fp ) is derived by solving the
k f 2i = ; m f 2i = A f 2i l f 2i ; dynamic equation of the piezostack (equation (1)). The inputs
l f 2i
of the flexible beam dynamics block are the force Fp and
(Rs2 Rn2 ) ln(Rs /Rn )
b f 2i = 8l f 2i the displacement of the beam end ( y0 ) which is equal to the
(Rs2 + Rn2 ) ln(Rs /Rn ) (Rs2 Rn2 ) displacement of the needle part ( yn ). From Fp and y0 , by
A f 3B solving the dynamic equation of the beam (equations (2)), the
k f 3i = ; m f 3i = A f 3i l f 3i ;
l f 3i force Fn from the needle acting on the beam and the piezostack
(Rdc
2
Rn1
2
) ln(Rdc /Rn1 ) displacement yp are obtained. The force Fn is then considered
b f 3i = 8l f 3i as an input of the needlefluid dynamics block (equation (12)).
(Rdc + Rn1 ) ln(Rdc /Rn1 ) (Rdc
2 2 2
Rn1
2
)
A f 4B
k f 4i = ; b f 4i = 8l f 4i ; m f 4i = A f 4 l f 4i 4. Results and discussion
l f 4i
(R 2 R 2 2 Rn2 ln(Rs /Rn ))
f v,2i = 4l f 2i 2 s 2 n In order to analyze the dynamic behavior of the proposed
(Rs + Rn ) ln(Rs /Rn ) (Rs2 Rn2 ) jetting dispenser, computer simulation is conducted based
(R 2 R 2 2 Rn12
ln(Rdc /Rn1 )) on the proposed lumped parameter model. Noteworthily,
f v,3i = 4l f 3i 2 dc 2 n1
(Rdc + Rn1 ) ln(Rdc /Rn1 ) (Rdc
2
Rn12
) significant structural components of the dispenser such as the
piezostack, the flexible beam, and the actuating spring are
where B and are the bulk modulus and viscosity of the fluid,
designed in order to achieve operational requirements (needle
respectively. l f 1i , l f 2i , l f 3i , and l f 4i are the lengths of the i th
motion amplitude: up to 0.4 mm; operating frequency: up to
lump of adhesive flow in the nozzle, the seat-annular duct, the
700 Hz). In this study, the design procedure is performed as
dispensing chamber, and the connecting pipe, respectively. Rs ,
follows.
Rdc , Rn and Rn1 are radii of the seat, the dispensing chamber,
the ball-needle, and the middle part of the needle, respectively. (1) Choose a commercial piezoelectric actuator and obtain its
Equations (4) and (5) can be rewritten in matrix form as performance characteristics (in this study, a low-voltage
follows: piezostack made by PIEZOMECHANIK is employed).
M X + B X + K X = F (9) (2) From the proposed dynamic model of structural part
(equations (1), (2) and (4)), find the significant
where the state vector X = [yn , x f 0 , x ef0 , x f 1 x f 1 N , geometric dimensions of the beam so that the maximum
x f 21 x f 2 N , x ef2 , x f 31 x f 3 N , x ef3 , x f 41 x f 4 N ]T . M, B, displacement of the beam end is greater than 0.4 mm and
and K are, respectively, the mass, damping, and stiffness the first resonance frequency of the beam is significantly
matrices, which are given in the appendix. Considering the greater than 700 Hz. In the design it is noted that the
integration between the needle part and the fluid part, and overall beam length ( L 1 + L 2 + L 3 ) is constrained to
applying the continuity equations of the dispensing adhesive, be smaller than 85 mm in order to reduce the size of the
the following relations can be obtained: dispensing system.
Af1 Af2 (3) Repeat steps 1 and 2 with other available piezoelectric
x f 0 = yn ; x ef0 = x f 11 + x f 21 ; actuators; hence several design sets are obtained.
An An
(10) Select the best design from the results obtained above
Af3 Af4 considering the operational requirements, compact size,
x ef2 = x f 31 ; x ef3 = x f 41 .
Af2 Af3 and cost of the dispenser.

6
Smart Mater. Struct. 17 (2008) 065028 Q-H Nguyen et al

Table 1. Design parameters of the structural components of the dispenser.

Piezostack Pst 150/20/720 Block force 11 kN
(Piezomechanik) Vs25
Max. displacement 68 m at 150 V
Density 7850 kg m3
Stiffness 1.52 108 N m1
Damping coefficient 8 N s m1
Contacting cap Hardening steel Mass 0.025 kg
Actuating spring Two flat ends spring Stiffness 2 105 N m1
Damping coefficient 40 N s m1
Transmission rod Hardening steel Mass 0.045 kg
Flexible beam Hardening steel Density 7800 kg m3
Youngs modulus 2 1011 N m2
Beam length L 1 = 70 mm,
L 2 = 10 mm,
L 3 = 1 mm
Beam cross section A 1 = 18 11 mm2 ,
A 2 = 18 11 mm2 ,
A 3 = 18 4.5 mm2

Figure 5. Geometric dimensions of the fluid part of the dispenser.

Table 1 shows the significant design parameters of the

piezostack, the flexible beam, the actuating spring, and the
flexible beam of the dispenser obtained from the above design
procedure. In order to reduce the manufacturing cost and easily
accommodate the proposed dispenser to the conventional
dispensing system, other components of the dispenser such as
the ball-needle, ball-seat, nozzle, dispensing chamber, etc, are
designed based on practical applications of the conventional
jetting dispensers widely used in industry. The geometric
dimensions of the proposed dispenser are shown in figure 5.
In order to validate the dynamic model, the proposed
jetting dispenser was manufactured and an experimental
test was undertaken. The experimental results were then
compared with the simulation ones. Figure 6 shows the
experimental configuration to test the dispensing performance
of the proposed dispenser. Via the interface card (DS1104,
dSPACE Co.), the input voltage from a personal computer is
sent to the piezostack of the dispenser after being magnified by
the voltage amplifier. The needle displacement is measured
by using a laser sensor (LK-G32, KEYENCE Co.). The
dispensing amount is measured by a semi-microelectronic
Figure 6. Experimental configuration for dispensing performance
evaluation.
analytical balance (R160P, DAVIS CALIBRATION) during
the dispensing process. The data from the sensor and the
balance are sent to the interface card and then processed
by the personal computer. During the dispensing process,
the adhesive (Hysol FP4451) is heated to 70 C at which
the density and bulk modulus are 1780 kg m3 and 1 GPa,
respectively. The experimental rheological property of the
adhesive was obtained using a cone-and-plate rheometer and
is presented in figure 7. By using a linear fitting method, the
approximate Bingham model parameters of the adhesive can be
determined as follows: yield stress: 240 Pa; viscosity: 104 cp.
Figure 8 shows the simulated and measured results
of the dispenser when a sinusoidal voltage, V = 70 +
70 sin(1400t /2), is applied to the piezostack and the
pressure in the syringe is kept constant at 6 bar. In the

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Smart Mater. Struct. 17 (2008) 065028
Figure 7. Rheological property of Hysol FP4451 adhesive at 70 C.
simulation, due to very small volume of the ball-seat chamber,
only one lump is used for this region. Each of other fluid
regions (the nozzle, the seat-annular duct, the dispensing
chamber, and the connecting pipe) is divided into five equal
lumps ( N = 5). The lumped parameters for the fluid part are
shown in table 2. The results show a good agreement between
the modeling and experimental results, which validates the
proposed lumped model. It is observed from the figure that,
via the flexible beam, the needle motion amplitude can reach
around 0.5 mm. From the results, it can be found that adhesive
Figure 8. Simulation and experimental results of the dispenser under sinusoidal driving voltage, V = 70 + 70 sin(1400t /2) and
constant syringe pressure, P = 6 bar.
8
Q-H Nguyen et al
fluid is dispensed in nearly the same amount of 0.57 mg at each
cycle and that the average dispensing flow rate is 400 mg s1 .
Figure 9 shows the frequency response of the dispenser
when a sinusoidal voltage is applied to the piezostack, V =
70 + 70 sin(2 f t /2). The figure shows that the first
resonance frequency of the dispenser is 860 Hz. This is also
the first resonance frequency of the beam. It is observed from
figure 9(a) that the amplitude of the needle motion is different
at different values of operating frequency. This results in a
large nonlinear variation of the dispensing flow rate with the
operating frequency, as shown in figure 9(b). Therefore, if an
open loop flow rate controller based on the operating frequency
is employed, a large variation of dispensing dot size may occur.
In order to reduce the nonlinear variation of the flow
rate with the operating frequency, the amplitude of the
needle motion should be controlled to be constant at different
operating frequencies. In this study, in order to achieve a
desired flow rate (or dispensing amount), a control system,
which is based on the control of needle motion, is proposed
for the dispenser. A desired sinusoidal trajectory of the needle
is defined as follows:
yn,d [mm] = 0.2 + 0.2 sin(2 f t /2) (13)
where the frequency, f , is determined from simulation results
as a function of the dispensing flow rate. It is noteworthy that
the amplitude of the desired needle trajectory in this case is
chosen to be smaller than that in our previous study [8] because
Smart Mater. Struct. 17 (2008) 065028 Q-H Nguyen et al

Table 2. Lumped parameters of the fluid part of the adhesive (Hysol FP4451) at 70 C.
Lumped parameters

Components of Stiffness Damping Mass Yield stress Needle frictional

the fluid part (N m1 ) (N s m1 ) (kg) force (N) coefficient (N s m1 )
Nozzle 1.256 105 0.0015 1.38 107 8.4 105 0
Seat-annular duct 4.91 106 0.009 3.456 106 9 104 0.0039
Dispensing chamber 3.142 106 0.0564 8.64 105 0.011 0.025
Connecting pipe 2.827 106 0.0151 3.31 104 0.125 0
Ball-seat chamber 3.927 107 0 2.765 107 0 0

Figure 10. Dispensing flow rate at different frequencies of desired

needle motion.

Figure 9. Frequency response of the dispenser.
the operating frequency in this study is higher. Figure 10 shows
the modeling results of the dispensing flow rate at different
values of the operating frequency of the desired trajectory.
From the results, the operating frequency can be predicted by
f [H z] = A0 + A1 eQ d /t 1 + A2 eQ d /t 2 . (14)
In the above, Q d is the desired dispensing flow rate (mg s1 ).
The coefficients A0 , A1 , A2 , t1 , and t2 are calculated using the
least-squares method to be 2560, 1668, 1666, 201.8, and
351.1, respectively. In order to control the desired trajectory of
the needle, a discrete PID controller is designed as follows:

k
e(k) e(k 1)
u(k) = kp e(k) + ki TS e(i ) + kd (15)
TS
i=0
where kp , ki , and kd are the proportional, integral, and
derivative gains, respectively. TS is the sampling period and
e(k) is the k th error. The block diagram for the control system
employed is shown in figure 11.
Figure 12 presents the controlled dispensing results using
the proposed control system. The imposed proportional,
integral, and derivative gains are selected as 2.2 106 V mm1 ,
100 V mm1 s1 , and 16 V s mm1 , respectively. These gains
are determined as follows. First, by tuning the gains through
the proposed model, initial values of the gains are obtained.
These values are then adjusted from experimental results by
trial and error. The desired dispensing amount is shown by the
dashed line in figure 12(d), which consists of three segments
corresponding to desired dispensing flow rates of 145 mg s1 ,
90 mg s1 , and 135 mg s1 , respectively. The corresponding
desired trajectory of the needle is shown by the solid line in
figure 12(c). It is observed from the results that the desired
trajectory is well achieved by the discrete PID controller with
a tracking error not more than 7%. The results also show
that, by controlling the needle motion, the desired flow rate
can be successfully achieved. The control voltage applied to
the piezostack to control the desired trajectory of the needle
is shown in figure 12(a). It is noted that the control voltage
is limited by the piezostack performance, ranging from 30
to 150 V. The simulated and measured displacements of the
piezostack are presented in figure 12(b). For the proposed
control system, the maximum working frequency is limited
by the resonance frequency of the flexible beam, which is
around 860 Hz, at which a maximum dispensing flow rate
of 155 mg s1 can be achieved. Higher than this frequency,
the resonant effect of the flexible beam causes difficulty in
controlling the needle motion. When the working frequency

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Smart Mater. Struct. 17 (2008) 065028 Q-H Nguyen et al

Figure 11. Block diagram for the dispensing flow rate control system.

Figure 12. Controlled dispensing results.

reduces to 300 Hz, the corresponding flow rate is decreased
to around 80 mg s1 , at which the inertia force is not large
enough to break the adhesive stream to form dots. It is
finally remarked that the proposed dispenser is not only much
easier for design, manufacturing, and maintenance, but also
has a wider range of flow rate control than previous piezostack
driven dispensers [810] owing to its large operating frequency
band.
5. Conclusions
In this work, a new type of high speed jetting dispenser
featuring a piezostack and a flexible beam was proposed to
provide a small dispensing dot size at a high dispensing flow
rate. Via the flexible beam, the piezostack displacement was
magnified to reach up to 0.4 mm (or more) for dispensing
high viscosity adhesives. A lumped parameter based dynamic
model has been formulated by considering the behaviors of the
piezostack, the flexible beam, the needle part, and the adhesive
fluid. Based on the proposed model, a jetting dispenser
which can be applicable to semiconductor electronic packaging
was designed and manufactured. Dynamic behaviors of the
dispenser and its dispensing amount were evaluated through
both simulations and experiments. A PID controller has
been designed and successfully implemented to control the
dispensing flow rate (dispensing amount) of the dispenser
by controlling the desired sinusoidal motion of the needle.
The results presented in this work are quite self-explanatory,
justifying that the proposed jetting dispenser can be effectively

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Smart Mater. Struct. 17 (2008) 065028 Q-H Nguyen et al

utilized in several applications such as flip-chip packaging

processes.

Acknowledgment

This work was supported by the Korean Industrial and

Technology Foundation (KOTEF) through the Laboratory of
Excellency Program. This financial support is gratefully
acknowledged.

Appendix. The mass, damping, stiffness, and

transform matrices for the needlefluid part
integrating model

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Smart Mater. Struct. 17 (2008) 065028 Q-H Nguyen et al

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