= 3.317, this is the mean for flow rate 125.

Sample variance becomes:-

( ) ( ) ( ) ( ) ( ) ( )

=0.577

Standard deviation=ơ= =0.76 and standard error=SE= ơ/ n=0.76/ =0.31

Again we calculate for flow rate 200

 =3.933, this is mean for flow rate 200

Sample variance becomes:-

( ) ( ) ( ) ( ) ( ) ( )

=0.6746

Standard deviation becomes:-ơ = =0.821 and

Standard error=SE= ơ/ n 0.821/ =0.34

Now we can calculate common variance: df=n1+n2-2=6+6-2=10

( ) ( ) ( ) ( )
Sp2= = =0.6258

S = =0.791
p

to= = =1.35
√ √

b) What is the P-value for the test in part (a)?

From the t-distribution table we can read the P value for 0.25 and 0.1which are 0.7 and
1.372 respectively. Since our z value is 1.35 we carry out interpolation
( )( )
P=0.25-[ =0.105
Since H1 is not equal to alternative we double the value of P or it is two sided
P=2*0.105=0.21.
c) does the C2F6 flow rate affect the wafer to wafer variability in etch uniformity? Use
α=0.05
H0:ơ12= ơ22 and H1: ơ12 ơ22
F0.05,n1-1,n2-1 we can read from f distribution table
F0.05,5,5 = 5.05

F0 = = = 0.86; we do not reject .because F 0< F0.05,5,5,


C2F6 flow rate does not affect wafer to wafer variability
d) Draw box plots to assist in the interpolation of the data from this experiment
 The box plots shown below indicate that there is little difference in uniformity at
the two gas flow rates. any observed difference is not statistically significant. See
the t-test in part (a)
 ANOVA

SST=7.402

SSTreatment = 1.141
SE=SST – SSTreatment = 7.402-1.141 = 6.261
Ms T=SSTreatment/df=1.141/1=1.141
MSE=SSE/DF = 6.261/10 = 0.626

F = MST/MSE=1.822
Descriptives
fl0w rate 200

N Mean Std. Deviation Std. Error 95% Confidence Interval for Mean Minimum Maximum

Lower Bound Upper Bound

125 6 3.3167 .76004 .31029 2.5190 4.1143 2.60 4.60
200 6 3.9333 .82138 .33533 3.0713 4.7953 2.90 5.10
Total 12 3.6250 .82034 .23681 3.1038 4.1462 2.60 5.10

ANOVA
fl0w rate 200

Sum of Squares df Mean Square F Sig.

Between Groups 1.141 1 1.141 1.822 .207

Within Groups 6.262 10 .626
Total 7.402 11

Solution :
The difference of the two methods will be:
Difference(d)
 Difference(d)2
D/ce(d) 0.125 0.159 0.25 0.277 0.135 0.224 0.328 0.451 0.507
9
D/ce(d)2 0.015625 0.025 0.06 0.0767 0.0182 0.0501 0.1075 0.2034 0.2570
281 7081 29 25 76 84 01 49

Sum of the difference(d)=2.465 and sum of the difference square(d) 2=0.821151,

Hypothesis : Ho: µ1= µ2 , H1: µ1≠ µ 2 equivalently can be written as
Ho: µd= 0 , H1: µd≠ 0

= ∑ = =0.274

(∑ (∑ ) )
( )
( ( )
=0.135
( )

t0 = = =6.08

tα/2,n-1= t0.025,9=2.306, reject the null hypothesis.

b)what is the p-value for the test in part(a)?

- tα/2,n-1 µd + tα/2,n-1
0.274-2.306*0.135/ µd 0.274+2.306*0.135
0.17023 µd
d) investigate the normality assumption for both samples.

Report
shear strength

Mean N Std. Deviation Std. Error of Sum Variance

Mean

.27389 9 .135099 .045033 2.465 .018

e) Investigate the normality assumption for the difference in ratios for the two
methods
 f) As in any t- test, the assumption of normality is of only moderate importance. In the paired
t-test the assumption of normality applies to the distribution of the differences. That is the
individual sample measurements do not have to be normally distributed, only their
difference.
ANOVA

SST=0.528

SSTreatment = 0.338
SE=SST – SSTreatment = 0.528 - 0.338 = 0.190
Ms T=SSTreatment/df=0.38/1=0.38
MSE=SSE/DF = 0.190/16 = 0.012

F = MST/MSE=0.38/0.012 = 28.41
 ANOVA
method

Sum of Squares df Mean Square F Sig.

Between Groups .338 1 .338 28.411 .000

Within Groups .190 16 .012
Total .528 17

Given: n=8 for both solutions that means for solutions 1 and 2

Now we can calculate for solution1

= =9.925 this is mean for solution 1

Sample variance becomes:-

( ) ( ) ( ) ( ) ( ) ( )
( ) ( )

=0.216
1

Standard deviation becomes:-ơ1= =0.465

Standard error=SE= ơ1/ =0.465/ =0.16

In the same way

= 10.362, SE2= 0.082 and Ơ2=0.233

Now we can calculate common variance: df=n1+n2-2=8+8-2=14

( ) ( ) ( ) ( )
Sp2= = =0.349

S = =0.59
p

to= = =-2.38
√ √

a)Find the a95 percent confidence interval on the difference in mean etch rates

9.925-10.362 - t0.025,14*0.59*0.5

-0.86

C) Use normal probability plots to investigate the adequacy of the assumptions of normality and
equal variances.
Both the normality and equality of variance assumptions are valid.

ANOVA

SST=2.479

SSTreatment = 0.681
SSE=SST – SSTreatment = 2.479 – 0.681 = 1.799
Ms T=SSTreatment/df=0.681/1=0.681
MSE=SSE/DF = 1.799/14 = 0.128

F = MST/MSE=0.681/0.128 = 5.29

ANOVA
slotution

Sum of Squares df Mean Square F Sig.

Between Groups .681 1 .681 5.297 .037

Within Groups 1.799 14 .128
Total 2.479 15