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JOURNAL OF THE ELECTROCHEMICAL SOCIETY

SOLID-STATE SCIENCE
JULY
--AND TECHNOLOGY
1972

On the Mechanism of Low-Temperature Oxidation


(23~176 of Polycrystalline Nickel
M. J. Graham and M. Cohen*
Division of Chemistry, National Research Council of Canada, Ottawa, Ontario, Canada KIA OR9

ABSTRACT
The oxidation of "clean" nickel has been investigated from 24 ~ to 450~ at
oxygen pressures of 5 X i0 -s to 6 X 10-* Tort. Ultra-high vacuum techniques
made it possible to start oxidation on specimens free of oxide and surface
impurities such as C, Si, and S. Oxygen uptake was measured manometrically
with a capacitance gauge of submonolayer sensitivity. Initial rapid oxygen ad -
sorption (and place exchange) on nickel was followed by slower oxidation
obeying a logarithmic rate law over the thickness range 8-30A. Growth of
thicker films was in accord with a parabolic rate law, transport through the
oxide occurring predominantly via easy diffusion paths. The value of 41 kcal.
mole -I calculated from an Arrhenius plot of the parabolic rate constants from
300 ~ to 450~ is an approximate measure of the activation energy for growth via
leakage paths. A pt/6 dependence of the parabolic growth rate on oxygen
pressure was found at 450~

Nickel oxidation is considered to be one of the sim - pler systems Specimen ~naterial.--Zone-refined nickel sheet (0.02 cm
of study since o n l y one oxide, NiO, is produced, and p a r t l y for thick) supplied b y Materials Research Corporation was used. It was
this reason has been the subject of n u m e r o u s investigations (1). analyzed to be 99.998% nickel, con - t a i n i n g as impurities (in
NiO, a p - t y p e semiconductor, grows by the o u t w a r d m o v e ppm atomic): C, 2; O, 3; F, <0.1; Na, 0.2; Mg, 0.5; Si, 0.7; C1, 0.2;
m e n t of nickel cations and electrons via vacancies and holes. K, 0.2; Cr, 0.6; Fe, 6; S, not detected.
At high temperatures, say >1000~ parabolic growth is g e n e r a l l Gases.--Spectroscopically standardized oxygen (<70 v p m
y observed. However, at m o d e r a t e t e m p e r a - impurities) and h y d r o g e n (<14 v p m impurities) were used
tures ( a r o u n d 500~ a v a r i e t y of e x p e r i m e n t a l kinetics (Baker Chemical C o m p a n y ) .
have been reported . These include parabolic
(2) , two stage logarithmic (3, 4), and logarithmic followed by Specimen preparation.--Coupons, 0.02 by 1 cm and from 2 to
quartic (5) rates of oxidation . It m a y be that differences in m a t e r 4 cm long, were degreased, chemically polished for 30 sec at 85~ in
i a l purity, surface preparation, and p r e t r e a t r n e n t could a m i x t u r e of 30% v o l u m e nitric acid, 10% sulfuric acid, 10%
account for the v a r i a t i o n in e x p e r i m e n t a l data, and the phosphoric acid, and 50% acetic acid, and t h e n electropolished for
present w o r k on we]l - characterized surfaces was u n d e r t a k e 2 rain at 23~ in a 4 - v o l u m e sulfuric a c i d : 3 - v o l u m e w a t
n in an attempt to resolve some of the discrepancies and, if possible, e r m i x t u r e at a c u r r e n t density ,.-0.5 A 9cm -~. Chemical
to present a simplified model for the l o w - t e m p e r a t u r e polishing removed about 5 ~,m a n d electropolishing 8
oxidation of nickel.
ION pUMP
Experimental
Apparatus.--The oxidation a p p a r a t u s is shown sche-
matically in Fig. 1. It is a n i m p r o v e d design of an earlier m a n
M.K.S TO GAS
o m e t r i c system (6), h a v i n g u l t r a - h i g h v a c u u m CAPACITANCE ~/HANOLING
capabilities (pressures <3 X 10 -*~ Torr after GAUGE --
bakeout at 250~ and e m p l o y i n g a sensitive capaci - tance gauge LEAK
to follow the p r e s s u r e decrease with time d u r i n g oxidation . VALVE
The gauge was an M.K.S. I n s t r u - m e n t s 90H - l, held at 30~
by a t e m p e r a t u r e controller (Type 1090-1). W i t h the
exception of the quartz speci-m e n c h a m b e r the apparatus was
all m e t a l a n d con - t a i n e d a w o r k i n g v o l u m e of about 1 TO OIL
DIFFUSION
liter. At oxida - tion pressures ~ 5 X 10 - s Torr, s u b - m o n o l a y PUMP
e r ad - sorption was readily measured . D u r i n g pressure m e a -
surements, the reference side of the capacitance gauge w a s p u m p e
d w i t h a n 8 liter 9 sec -1 ion pump . Speci - m e n heating was b y PARTIAL
L PRESSURE
a t u b e f u r n a c e (hot zone variation of • 1 7 6 a r o u n d the SPECJMEN GAUGE
quartz tube . CHAMBER TEE
VALVE
9Electrochemical Society Active Member.
K e yw o r d s : kinetics , p r e s s u r e d e p e n d e n c e , m a n o m e t Fig. I. Manometricoxidationsystem
r i c apparatus.

879

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880 J. Electrochem . Soc.: SOLID-STATE SCIENCE AND TECHNOLOG
Y J u l y 19 72
#m of material . T h e s p e c i m e n was t h e n placed on a p l a t i
n u m support in t h e quartz t u b e of t h e o x i d a t i o n system.
0.6
40
Oxidation . ~Afte r bakeout, t h e following p r o c e d u r e s w e
r e c a r r i e d out. o<
(i) W h e n the system had cooled, 1 T o r r o x y g e n was a d so
m i t t e d for 1 hr to s a t u r a t e the walls of t h e system; this m i n 0,4 500~ C
i m i z e d surface adsorption during a subsequent o x i d a t i o n e x E
periment. 20 ~
N

(ii) To decrease the carbon i m p u r i t y concentration t h e 200~ C


specimen was h e a t e d to 700~ and enough o x y g e n a d m i t t e x
o
0.2

d to produce ~ 1 0 0 A of NiO. D u r i n g continued a n n e a l i n g 25 ~ C


Io
of the film in v a c u u m , CO evolved . [Gas analyzed by an A.E.1
Minimass p a r t i a l pressure gauge (Fig. 1)]. In some e x p e r i m e
n t s t h e capacitance gauge was used to follow t h e pressure I 1 I i I
0 2 4 6 8 I0
increase in the system due to CO formation, p r e s u m a b l y by the TIME, rain
reaction: C 4- NiO -~ CO 4- Ni, and corresponded a f t e r 2~/z h r
Fig. 3. Early stages of oxidation of polycrystalline nickel up
at 700~ to the r e m o v a l of > 1 p p m of C f r o m the speci - men .
to 340~ in 5 X 10 - ~ Torr oxygen; expansion of data in Fig. 2.

(iii) The r e m a i n i n g oxide was reduced w i t h 1 Torr


h y d r o g e n at 600~ Gas was a d m i t t e d for 5 min, p u m p e d cm -2. Mean oxide thicknesses are also g i v e n and h a v e been
out, and t h e system refilled w i t h fresh h y d r o - gen. calculated assuming a roughness factor of 1 and an NiO density of
6.75 (1 #g o x y g e n cm - ~ e q u i v a l e n t to 69.2A of NiO) . U p
(iv) H y d r o g e n was p u m p e d out and the t e m p e r a t u r t a k e s are low up to 340~ and the e a r l y stages of oxidation are b
e set to the oxidation t e m p e r a t u r e . W h e n t h e r m a l e q u i e t t e r o b s e r v e d in the e x p a n d e d plot of Fig. 3. Duplicate e
- l i b r i u m was established and the pressure was ~ 5 • 10 - 9 Torr, x p e r i m e n t s w e r e carried out at most t e m p e r a t u r e s ;
the oxidation was performed . T h e "tee" v a l v e (Fig. 1) was first the r e p r o d u c i b i l i t y of oxidation is indicated by the two runs
closed and the initial o x y g e n dose size m e a s u r e d before at 200~
oxidation of t h e specimen began. In this way, w h e n the tee v a l v As seen in Fig. 3, an initial e x t r e m e l y rapid oxida - tion is f o
e was opened l l o w e d by a transition to a period of l o w e r oxidation rate. At
the e x t r e m e l y rapid initial uptake by t h e specimen could be room t e m p e r a t u r e an uptake of 0.15 ~g o x y g e n cm - 2 is
determined . Calibration runs w i t h o u t speci - mens at each e x p approached, e q u i v a l e n t to a limiting oxide thickness of about
e r i m e n t a l t e m p e r a t u r e m e a s u r e d the small uptake on 10A. A t 200~ a continuing uptake is m e a s u r e d and t h e data
the walls of t h e system. O x i d a - tion pressures r a n g e d from 5 are found to follow a direct l o g a r i t h m i c l a w of the form, x =
• 10-~ to 6 • 10 -1 Torr; pressures quoted are a v e r a g e values and A in t + B, w h e r e x is t h e o x y g e n u p t a k e (thickness) and t
d u r i n g the course of oxidation w e r e adjusted to ~25% above the oxidation time (see Fig. 4). Thin film data (up to ~ 3 0 A ) at h i
(by a d m i t t i n g m o r e o x y g e n ) , and allowed to fall ~25% g h e r t e m p e r a t u r e s also follow a logarithmic law; the d u r a
below these values . t i o n of the log dependence diminishes w i t h t e m p e r a t u r e
and at 340~ (as seen in Fig. 4) applies for only the first 2 rain of
Surface and oxide examination.--To ensure that no c o n t a m oxidation . Thicker films ( > 3 0 - 4 0 A ) , as illustrated by data at
i n a t i o n had occurred, surfaces p r e t r e a t e d as above and oxidized 340 ~ and 400~ in Fig. 5, g r o w in accordance with a p a r a - bolic
at l o w t e m p e r a t u r e s w e r e a n a l y z e d for i m p u r i t i e s by rate law.
x - r a y emission techniques (7). Replicas of oxide surfaces and stripped
oxide films w e r e e x a m i n e d by electron microscopy .
L
c~ 9 eJ
Results E o-e~ 0-60' E
o 0.2~ /9 | o
The kinetic curves for the oxidation of p o l y c r y s - talline
nickel (-~120 #m a v e r a g e grain d i a m e t e r ) from room t e m Z ---~ Z
p e r a t u r e to 450~ in 5 • 10 - s T o r r oxygen are shown in Fig. 2.
200~C 9 --
Uptake is expressed as #g o x y g e n a_ 0.45 a_

I i ] - i - - I I
I0, ~ ~ 7 0 0
0.15 9 , , , I , , ~ ~1 , , , r , ,, =dO.30
OJ 0.5 1.0 5.0 I0
TIME, min
Ec~8J ,600
Fig. 4. Logarithmic plot of data from oxidation of a
polycrystalline nickel at 200 ~ and 340~

61 r
i ~'B,.o ~ ~
45o'c _~
c~c~
I0 ::L
,- g

~_00
~0.5 340 ~ C -O

~ / 365- ~100 400 ~ C


-- 340
_ ~oop 9~ , 9
I P I I I 0
,; 2'0 s'0 4o 5o 6o 0 I0 20 50 40 50 60
TIME, rnin TIME, rain
Fig. 2. Oxidation of polycrystalline nickel from 23 ~ to 450~ in Fig. 5. Parabolic plot of data from oxidation of polycrystalline
5 X 10 - 3 Torr oxygen. nickel at 340 ~ and 400~

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Vol. 119, No. 7 LOW-TEMPERATURE OXIDATION OF N
ICKEL 881

approaching a coverage value of three. It is considered that r e a r r


a n g e m e n t of the initial adsorbed layer occurs b y a process of
rapid place exchange (17, 18), r e s u l t - ing in the formation of
nickel oxide.

'E
500 6 I0 t Logarithmic growth.--Continued growth on the initial
oxide occurs m u c h more slowly and the present data follow a
logarithmic rate law from ,~8-30A, a s illustrated b y results at 200 ~
and 340 ~ i n Fig. 4.
Previous w o r k on nickel oxidation in this thickness range has
also indicated logarithmic growth (19, 20), and m a n y theories
O0
have b e e n developed to account for logarithmic kinetics (21-27).
Besides t h e difficulty in deciding w h e t h e r t h i n film data
follow a direct or i n - direct logarithmic law (the present results fit
the former b e t t e r ) , the absence of other i n f o r m a t i o n such
20 40 60 80 I00 120 as the pressure dependence and the effect of electric fields on t h i n
TIME, rain
film growth, makes it difficult to favor a particular process (either
Fig. 6. Parabolic plots of data from the oxidation of electron or ionic transport, or chemisorption at the outer oxide
polycrystalline nickel at 450~ in 5 X 10 - 3 , 5 X 10 - 2 , and 6 surface) as the r a t e - d e t e r m i n i n g step.
X 10 - t Tort oxygen.
Parabolic growth.--For oxide thicknesses above 30-40A the
To e x a m i n e the effect of pressure on the kinetics, oxygen data follow parabolic kinetics (see Fig. 5 and
uptakes at 450~ were m e a s u r e d at three dif - ferent pressures: 5 6) . 1 As m e n t i o n e d earlier various rate laws h a v e been
X 10 - 3 , 5 X 10 - 2 , and 6 X 10 -1 Torr. I n Fig. 6 the data are previously reported for nickel oxidation at 400~176 including
plotted parabolically and a good relationship is observed. parabolic (2), two stage logarithmic (3, 4), and logarithmic followed
Expressing the rate constant, Kp, proportional to (oxygen pressure, b y f o u r t h power (5). We would consider that the v a r i e t y of
p)l/n, the value of n can be obtained by plotting lOgl0Kp against results arise from the development of s t r u c t u r a l l y different
logl0P. F r o m Fig. 7 the data fit a reciprocal slope of n = 6 m u c h oxides whose formation has b e e n influenced b y the n a t u r e of
better t h a n one of n = 4. Although only three orders of m a g n i t u the starting surface. I n this i n t e r m e d i a t e t e m p e r a t u r e
d e of pressure could be covered with the present gauge, a pl/6 range where g r a i n b o u n d a r y diffusion is a n i m p o r t a n t
relationship would seem to be applicable, at least over the present r factor, a change in oxide grain size with oxidation time could cause
a n g e of study. a c o n t i n u e d decrease i n the a p p a r e n t parabolic rate
constant (28), accounting for deviation from parabolic kinetics. The
Discussio n initial oxide g r a i n size and epitaxy will depend on the n a t u r e
The oxidation m a y be considered to proceed in three stages. (both chemical and physical) of the surface prior to oxidation. I m -
Initial adsorption (and place exchange) is fol-lowed by slower purities such as c a r b o n and sulfur t e n d to segregate at the
oxidation obeying a logarithmic law (from oxide thicknesses 8- nickel surface (29, 30) and the influence of carbon and silicon on the
30A), and if the t e m p e r a - t u r e is sufficiently high for f u r t h oxide epitaxy has b e e n reported
e r t h i c k e n i n g to occur, this continued growth obeys a
parabolic rate law. (31) . Also, the presence of a prior oxide film affects s u b s e q u e
n t oxide morphology and growth, a point which is demonstrated i n
Initial stage.--Evaporated metal films have been used the following paper (32). The oxide - free starting surfaces in this w
extensively for m e a s u r e m e n t s of sticking coeffi-cients (8), o r k are considered to be clean; the e x p e r i m e n t a l procedure
heats of adsorption (9, 10), and surface potentials (11, 12) of resulted in surface i m p u r i t y concentrations of sulfur, silicon,
oxygen on nickel from --196 ~ to and iron below the limit of detection of the x - r a y emission
150~ On nickel single crystals, electron diffraction techniques have technique (7), which is about 5% of a monolayer . Carbon i m p u r i
identified s u b - m o n o l a y e r structures (13-16). If nickel and t y levels w e r e also u s u a l l y as low, although w i t h decreasing
other metals such as Fe, Co, and Ti are exposed to oxygen at room oxidation t e m p e r a , l u r e there was an increased p r o b a b i l i
temperature, more t h a n a m o n o l a y e r of oxygen is r a p i d l y t y of carbon c o n t a m i n a t i o n due to cracking of the <10 - 9
adsorbed with an u n c h a n g i n g heat of adsorption. The heats of Torr back - ground carbon monoxide .
ad - sorption m e a s u r e d are similar to heats of formation of the
oxide (9), and coverage values on nickel at saturation correspond to Oxides produced on these "clean" and fiat nickel surfaces were
about two to three oxygen atoms per surface metal atom (9, 10). not well oriented; t h i n n e r oxides (a few h u n d r e d angstroms
The present data at room t e m p e r a t u r e give a n i n s t a n t a n thick) exhibited preferred orienta - tion, b u t with increasing
e o u s uptake thickness tended to become more polycrystalline . I n addition,
3.4
oxide grain size increased with temperature, from --100A at
/ 300~176 to ,~1000A at 450~ The m a n y grain boundaries, and
/
/ perhaps s u b g r a i n b o u n d a r i e s present i n these oxide films
/
/
/ are considered to be paths for easy nickel diffu-sion (33, 34), the
/ anisotropy of oxidation i n the t h i n - film range reflecting a v a r y
-3.6 /
n=4// / i n g density of these high - diffusivity paths (35). Because of s t r u
c t u r a l changes of the oxide with t e m p e r a t u r e , the
(2_ // activation e n e r g y of 41 kcal 9mole - t calculated from the
parabolic rate
d -3,8 //
// constants over the t e m p e r a t u r e r a n g e 300~176 (see Fig. 8)
is considered to be o n l y an approximate m e a - sure of the
activation e n e r g y for growth via leakage paths. 2

-3,0 -2.0 -I.0 1 Good parabolic behavior was maintained in the longest oxidation
Loglo P e x p e r i m e n t performed ---- 64 h r a t 450~( o x i d e t h i c k n e s s ~ 1 ~ m ) .
2 As w i l l b e s e e n i n t h e f o l l o w i n g publication, a lin
Fig. 7. Logarithm of parabolic rate constants for oxidation of e of slope 37
kcal.mole-~ may be drawn through the present
polycrystalline nickel at 450~ plotted against logarithm of oxida- data and rates of
tion pressure. The bars on the data indicate the considered oxidation from 500 ~ t o 700~ T h i s value,, w h i l e again pr
errors. Lines drawn have reciprocal slopes n = 6 and n = 4. obably not
an a c c u r a t e m e a s u r e of t h e a c t i v a t i o n e n e r g y f o r g r o w t h v i a l e a k a g e
p a t h s b e c a u s e t h e s t r u c t u r e of t h e o x i d e is c h a n g i n g w i t h t e m p e r - a t u
r e , is s i g n i f i c a n t l y l e s s t h a n v a l u e s --~52 k c a l ' m o l e -1 r e p r e s e n t a t i v e
of l a t t i c e d i f f u s i o n t h r o u g h n i c k e l o x i d e (32).
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882 J. Electrochem . Soc.: SOLID-STATE SCIENCE A N DT E C H N O
LOGY July 1972

9. D. B r e n n a n , D. O. Hayward, and B. M. W. Trapnell,

4"01@~
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-

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t
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32. M. J. Graham, G. I. Sproule, D. Caplan, and M. Cohen, This
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