Potomac Photonics Inc.

4445 Nicole Drive

Lanham, MD 20706

ISO 9001:2008
ISO 13485

Laser Micromachining Notes

Materials

Mike Adelstein Potomac is your Micro Manufacturing

madelstein@potomac-laer.com leader from prototypes to production.
(301)459-3031 Contact us today.
 Potomac Photonics Inc.
Experts in Miniaturization 4445 Nicole Drive
Lanham, MD 20706

ISO 9001:2008
ISO 13485

 Microfabrication of features as small as 1-2 microns

 Process almost any material, including polymers, glass, ceramics
and metals
 Applications include: holes, channels, cutting, and marking on both
flat and conformal surfaces.
 New, advanced capability: revolutionary laser process developed at
Potomac allows for deposition of materials such as silver on
polyimide.
 Major industries served include: medical devices, biotechnology,
and electronics.

Laser Deposition: part of a bandpass Laser cut stent from stainless

filter. Silver deposited on Kapton steel
Holes in Polyurethane
2
tubing
Micromachining www.potomac-laser.com
 Potomac Photonics Inc.
Polymer spectra 4445 Nicole Drive
Lanham, MD 20706

ISO 9001:2008
ISO 13485

1.0

0.8

Polystyrene
0.6
Transmission

Polyimide
Acrylic
0.4 3mm thickness

Polycarbonate
0.2

Wavelength (µm)
0.0
.1 1 10

ArF KrF Nd:YLF

Micromachining www.potomac-laser.com
 Strong and weak Potomac Photonics Inc.
4445 Nicole Drive

absorbers Lanham, MD 20706

ISO 9001:2008
ISO 13485

1000

100
Absorption depth (µm)

PMMA
10

1
Polyimide

.1

.01
0.1 0.2 0.3 0.4 0.5

Wavelength (µm)
ArF KrF

Micromachining www.potomac-laser.com
 Potomac Photonics Inc.
Metal spectra 4445 Nicole Drive
Lanham, MD 20706

ISO 9001:2008
ISO 13485

Excimer YAG CO2

Micromachining www.potomac-laser.com
 Potomac Photonics Inc.
Crystal/glass spectra 4445 Nicole Drive
Lanham, MD 20706

ISO 9001:2008
ISO 13485

1.0

0.8 Sapphire

0.6
Transmission

Pyrex
MgF2
0.4
Fused Silica

1 mm thickness

0.2

Wavelength (µm)
0.0
.1 1 10

ArF KrF Nd:YLF

Micromachining www.potomac-laser.com
 Potomac Photonics Inc.
Ablation energy 4445 Nicole Drive
Lanham, MD 20706

ISO 9001:2008
ISO 13485

100

•  Modest Ceramic or metal ablation

100 µJ

laser 10
10 µJ
energy for
Fluence (J/cm2)
1 µJ

small 1
Polymer ablation
features 100 nJ

.1

.01
1 10 100
Focal Spot Diameter (µm)

Micromachining www.potomac-laser.com
 Potomac Photonics Inc.
4445 Nicole Drive
Pulse duration and the HAZ Lanham, MD 20706

ISO 9001:2008
ISO 13485
10000

Heat conduction distance

δ = (Thermal diffusivity x time)1/2
1000
Thermal Diffusion Distance (µm)

100 Stainless Steel •  Largest HAZ in good

Aluminum

Al2O3
thermal conductors
10
Glass •  Short laser pulses
Polyimide minimize HAZ
1

.1

Time (µs)
.01
.001 .01 .1 1 10 100 1000

Excimer QS YAG Pulse YAG Mod CO2

Micromachining www.potomac-laser.com
 Potomac Photonics Inc.
4445 Nicole Drive
Single pulse ablation depth Lanham, MD 20706

ISO 9001:2008
ISO 13485

Material Depth/pulse
Polymers 0.3 - 0.7 µm
Ceramics & Glass 0.1 - 0.2 µm
Diamond .05 - .1 µm
Ablation
Metals 0.1 - 0.2 µm depth

Conditions:
• Fluence - 2 to 10 J/cm2
• Strong optical absorption
• Pulse duration - 10 - 50 ns

Micromachining www.potomac-laser.com
 Potomac Photonics Inc.
4445 Nicole Drive
Focusing on repeatability Lanham, MD 20706

ISO 9001:2008
ISO 13485

•  Feature size
changes with
surface height
•  Largest effect with
high N.A. optics
Larger
diameter
•  Implications:
–  Fixturing
–  Substrate
uniformity
Smaller
–  Focus monitor diameter

Micromachining www.potomac-laser.com
 Potomac Photonics Inc.
4445 Nicole Drive
Light absorption by Lanham, MD 20706

ISO 9001:2008 polymers

ISO 13485

•  UV
1. Light excites bound
electrons Laser Beam

2. Some bonds break

3. Some electron energy
converted to molecular
vibrations (heat) Absorption region

•  IR Bulk polymer

1. Light excites molecular

vibrations (heat)

UV PRODUCES “COOLER” EXCITATION IN POLYMERS

Micromachining www.potomac-laser.com
 Light absorption in Potomac Photonics Inc.
4445 Nicole Drive

crystals & glasses Lanham, MD 20706

ISO 9001:2008
ISO 13485

•  UV
1. Photons excite Laser Beam

bound electrons
2. Electron excitation
converted to lattice Absorption region
vibrations (heat)
Bulk crystal
•  IR
1. Photons excite
lattice vibrations
(heat)
Micromachining www.potomac-laser.com
 Machining layered Potomac Photonics Inc.
4445 Nicole Drive

structures Lanham, MD 20706

ISO 9001:2008
ISO 13485
•  Top layer should
have lower ablation
threshold energy

•  Examples:
–  Polyimide on
copper
–  SiO2 on
aluminum
–  ITO on glass

Micromachining www.potomac-laser.com