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YOKU WAKARU SHINKU-GIJYUTSU written by ULVAC, Inc.

Copyright ULVAC, Inc., 2007.
All rights reserved.
First published in Japan by Nippon Jitsugyo Publishing, Tokyo.
This Traditional Chinese edition published by arrangement with
Nippon Jitsugyo Publishing, Tokyo
in care of Tuttle-Mori Agency, Inc., Tokyo
through BARDON-CHINESE MEDIA AGENCY, Taipei.
Complex Chinese edition right 2012 by Shu-Chuan Publishing House

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17

from Ulvac

Inc

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CONTENTS

10

12

14

16

18

20

22

26

10

24

28

11
30

12

34

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13

36

14

38

15
40

16

42

17
44

18
46

19 CD/DVD
48

20 CCD
50

21

52

22

54

23
56

24 PET

58

25 ICRFID Tag
60

26
62

27
64

28

66

29
68

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30
3

70

31

74

32
76

33
78

34 Conductance

80

35
82

36

84

37

86

38
88

39
90

40

94

41 U
96

42

98

43

100

44

102

45
104

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46

106

47

108

48

110

49

114

50 PVD

116

51

118

52

120

53 RF

122

54
124

55

126

56

128

57

130

58

132

59 CVD

134

60 CVD

136

61 CVD

138

62 CVDCVDALD

140

63

142

64

144

65
146

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66
148
RIE
67

150

68

152

69

154

70

156

71

160

72

162

73

164

74

166

169

173

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JIS

8,848

1/3
JIS

10

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JIS, Japanese Industrial Standards

1949

11
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78%21%

0.93%

1010,000

1m21010,0000

12

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LED
EL

HD/CD-ROM/
MO/DVD

Law-kHigh-k

CRT

IT

C3N4
Carbon
Nitride
YAG

76

13
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SI, The International System of Units

NT/m2PaPascal

17Torr, Evangelista
Torricelli
mmHg

mmHgTorrPaPascal
1960mmHgTorrTorrTorricellimmHgTorr

1mmHg1Torr
1993
mmHg
SIPa

Pascal

mbarmillibar
hPaPascalhundred-pascal=hPa1hPa=100Pa
barCGSdyne/cm 2 10 6 dyne/
cm2=1bar

17
mmHg

mmHgTorrPaPascal

14

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76

76cm

F
S a

F/Sa

B Sb
F/SaSb
Sa
Sb

A
Sa

F/Sa
F/Sa

15
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10 5Pa

10-12Pa
17

low vacuummedium vacuumhigh vacuum

ultra high vacuum4199010-8Pa
extremely high vacuum1990

JIS
Z8126-1

105Pa

16

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700100

380,000km

F2
(HF)

(Pa)

(m)

(m)

/cm2

(Torr)(mbar)

D
(VLF)

90~200km

E
(MFVHF)

F1
(MFHF)

400km

36,000km

100~300km

110/cm2
149,540,000km

10~50km

11,000m
8,848m
3,776m

1Pa

17
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PaPa

10-3Pa
10-5Pa10

10

Avogadro

122.4L6.0231023
10 5Pa

18

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mol

Pa

cm3

110

2.51019

2.51014

110-4

2.51010

-8

110

2.510

110-12

2.5102

P=P

P'=P

P'>P

P>P

P=P

1811

19
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105Pa700101Pa
0.7mm10-17cm10-2Pa70mm10-3Pa7m
10 -210 -3Pa12m70cm
7m

20

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100K

110-4

7101

110-8

7105

-12

110

273K

100K

710

25

(Pa) (m)
1105
710-8
710-3
1

m/s

21
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105Pa3x10-9

10-2Pa10-3Pa
0.310-6Pa510-8Pa
8
8

22

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105Pa

10-4Pa

10-6Pa

310-9 3

5
10-8Pa

8
300K

0.68
0.66
0.65
0.60
0.90
0.85
0.86
0.75
0.63
0.92
0.74

N2O
N2O
NH3
CH3OH
C2H5OH
CCL4
CH3CL
CH2CL2
CF2CL2
CH3COCH3

K
10
20.77
77
77
77
77
77
77
77
77

0.63
0.61
0.45
1.0
1.0
1.0
0.93
0.83
0.76
0.55

0.4

Ar
Ar
N2
N2
CO
CO
O2
CO2
CO2
H2O
SO2

K
10
20
10
20
10
20
20
10
20.77
77
77

CO2
0.5

0.3

0.2
0.1

480K

315K

420K

580K

024 6 8W1014
molec./cm2

23
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Chamber

1M2

24

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1.

2.

3.

4.
n

m1
m

n-m1
n

25
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BAKING

26

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1m2
1m2

18-8304
18-8304
18-8304
18-8304
NS 22 S
NS 22 S
Armco
Armco
Armco

400
25vol%HCI~25vol%H2SO4351050
15vol%HNO3~10vol%HF9010
2/0 C6H3

H21000
2/0 C6H6
No.2

20

1.04
3.74.05
1.36
3.06
1.12
1.3
2.6
1.22
3.4
3.8
1.1
200

78%

27
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10

pulse discharge

Geissler tube
10 3Pa
mA

28

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()

()

()

()

10

10

10

103

104

105
106
(Pa)

29
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11

30

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10
10
10-1
10-3
Knudsen number/

31
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2400

17

10

1640Berti10

13.61.2
76
cm

1000Puy-de-Dorme
8.5cm

TORR
1982SIPaPascal

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12

100
610Pa

-40
4~100Pa3060

1980

34

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interferon

101325Pa 100
12345Pa1/1050
610Pa1/2000
3.9Pa1/3 -50

35
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13

100

100
0.4Pa10280

36

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142, 143, 151, 152, 153

70

28

54, 55

58, 59

144, 145, 151

16, 17, 77, 88, 89, 112

151

82, 83, 93

130, 131

17, 18, 19, 20, 21, 30, 31, 102

14, 15, 32, 168

86, 87

152, 153

134

148, 149, 152

114

114, 115, 128, 129, 130

16, 17, 77, 88, 89, 112, 158

148, 149

95, 104, 105, 107

10, 11, 12, 13, 15, 16, 18, 19, 20, 22,

89, 92

23, 32, 34, 35, 36, 37, 40, 44, 72, 74, 76,

78, 79, 83, 88, 90, 98, 99, 100, 101, 110,

18

112, 134, 136, 158, 168

10, 11, 12, 32

13, 42, 43, 62, 63, 136, 165

160, 161

10, 11, 16

14, 15, 17, 32

13, 14, 15, 32, 96, 97

28

34, 35, 88, 93, 118

75, 76, 77, 78, 79, 90

114

56, 57, 144

13, 54, 70, 71, 77, 166

76

136, 152

58, 59

43, 47, 49, 65, 66

CVD134

152

142

89

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169
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31, 76, 77, 79, 94, 95, 98, 99

46, 47

123

34, 35

134

156, 157

34

49

52, 53

22

114, 115, 116, 118, 119, 120,

132, 133

121, 130, 131, 132

16

13, 36, 37, 50, 51, 53, 68, 69

152

13, 77, 99, 166, 167

16, 17, 48, 49, 77, 86, 89, 112,

52, 53

118, 119

52, 53

93

10, 12, 16, 37, 38, 40, 41, 45, 47,

152

53, 61, 69, 72, 74, 76, 77, 78, 79, 80, 82,

142

83, 84, 88, 89, 90, 91, 92, 93, 94, 110,

16, 17, 89, 95, 104, 105, 107, 112

115, 119, 129, 149, 166, 168

95, 104, 105, 107

24, 26, 27, 84

51, 154

77, 95, 97

17, 77, 88, 89, 90, 167

118

115

114

51

43, 46, 144, 145, 146

43, 46, 157, 165

76, 79, 90, 91, 167

27, 86, 87

78, 89, 92

118

28, 58, 70, 71, 120, 121, 122, 124, 125,

13, 26, 28, 29, 42, 43, 46, 54, 55, 62,

126, 128, 129, 130, 136, 138, 148, 153,

63, 68, 69, 114, 115, 116, 117, 120, 121,

156, 157, 160, 161, 165

122, 123, 124, 126, 127, 130, 131, 134,

165

135, 136, 147, 148, 149, 152, 153, 156,

12

157, 166, 167

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CVD115, 134, 135

144, 146

126, 127

82, 83

17, 28, 29, 76, 77, 79, 94, 95, 102, 103,

104, 105, 107

17, 29, 43, 44, 45, 46, 47, 48, 49, 50,

104, 105, 107

51, 52, 53, 61, 64, 65, 68, 69, 70, 76, 77,

89, 114, 115, 116, 117, 120, 121, 122,

62, 63, 154, 156, 157

123, 124, 125, 126, 127, 128, 129, 130,

36, 37, 67, 87, 132, 133, 151

136, 141, 144, 146, 160, 166, 167

87, 132, 133, 151

116

28

43, 116, 117, 122, 123, 127, 167

132

94, 95, 100, 101

44, 142, 143, 144, 145, 146, 147,

148, 149

146

115, 126, 127, 146

10, 11

54, 154, 155, 156, 157

CVD115, 134, 135, 136

115, 130, 131

95

144, 146, 147

102, 103

30

86, 87

94, 95

54, 71

ALD140, 141

CVD140, 141

56, 57, 97

B-A95, 102, 103

88

CCD50, 51

53

CVD64, 114, 115, 134, 135, 136, 137,

44

76, 77, 79, 94, 95, 102, 103,

76, 89, 90

138, 140, 141

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P62, 63, 154

DLC43, 64, 65, 136

RIE144, 148, 149, 152

ePTFE54, 55

ECR134

SIMS70, 71

ESCA70

SI14

ESD104

TFT47

FPD42, 43, 46, 121

Torr14, 17

HCD115, 131

U95

IC43, 44, 53, 60, 61, 114, 143

XPS70, 71

X31, 58, 59, 71, 102, 103, 104, 153

LCD42
LED13, 121, 136, 137, 166, 167
LSI44, 50, 121

M
MBE119
MEMS43, 56, 57, 144
MOCVD115
MS54

N
N62, 63, 154

P
PDP42, 43, 164
PET38, 58, 59
PTFE54, 55, 86
PVD114, 115, 122, 140

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; , ..
, 2012.07
.4
ISBN 978-986-121-762-8 ()
1.
446.735

101008938

ILLUSTRATED SCIENCE & TECHNOLOGY

1063394
(02)2705-5066(02)2706-6100
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shuchuan@shuchuan.com.tw
0 1 3 0 3 8 5 3

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(07)2358-702 (07)2350-236

2 0 1 2 7

280ISBN 978-986-121-762-8
Printed in taiwan

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