Growth of

Single Crystal Silicon

SFA
Si Crystalline

GKTEAL Grain Boundaries

Semiconductor
Devices
 How The Single Crystal Silicon is Obtained

Step 1 -- Raw material Quartz (Type of Sand)

Refining [EGS]

Step 2 -- EGS SCS

Czochralski (CZ)
Float Zone (FZ)
 CZ Process FZ Process

-- Crucible -- No Crucible
(Impurities) Highly pure Si

-- High thermal stress -- High voltage &

high power device
EGS Highly pure
(ppba) 1013/cm3
4
108
Raw Material

Quartzite Highly impure Impurities

Al 3 x 1020/cm3
 Reduced
Stage 1 Quartzite MGS
48%

Stage 2 MGS SiHCl3

Stage 3 SiHCl3 Distillation

Colorless Evaporation
Volatile Liquid Condensation
Stage 4 CVD of Si
SiHCl3
Poly EGS

Several hundred hours

EGS
 SiO2 + 2C Si + 2CO
Coal
Coke or wood chips
Si
2000oC SiC
SiO gasses
CO

12-14 Kwh/Kg
Al
Si
Fe
Stage 2 SiHCl3

MGS SiHCl3
Anhyd HCl Gasses at 300oC

MGS Finely Powdered

Si + 3HCl SiHCl3 + H2 SiCl4

80-90% Si2Cl6
CuCl H2SiCl2
 SiHCl3 SiCl4
Si2Cl6
H2SiCl2

Stage 3 Distillation SiHCl3

RT
31,8oC

SiHCl3 Highly Pure

 Stage 4 EGS

CVD & SiHCl3

Siemens Process
2SiHCl3 + 2H2 2Si(s) + 6HCl
1950s EGS
EGS Purity SCS
FZ Process
EGS

SCS

1. CZ Process 2. FZ Process
CZ Process

Concept Jan Czochralski

1916
Sc Si, Ge, GaAs

Metals Pd, Pt, Ag, Au SC

SCS
1916 CZ

1950s SC

1960s Ingots
CZ Growth Sequence
Silica Crucible
EGS Diluted Silicon Alloy

Si 1421oC
5mm d
100-300mm Length
 Relatively cooler
Eliminating dislocation
Dash Process
Temperature
Fluctuation

ADC
CZ

1. Furnance

2. CPM (Crystal Pulling Mechanism)

3. Ambient Control

4. Control System
CZ

1. Furnance Crucible Silika Thermally Stable

Non reactive
Graphite
Carbon Dust
2. CPM -- Minimal vibration
-- Precision
3. Ambient Control Chamber gas Inert Gas (Ar)
Flow Control Oxygen, CO
Vacum System 1500 L/Kg Si Growth

4. Control System Pull rate

Crucible rotation
Digital
Seed rotation
Computer
Melting temperature
System
Gas flow
Crystal diameter
CZ Oxygen Impurities

Power devices Lower breakdown voltages

Higher leakage current

FZ
FZ Process
Highly pure SCS
Aluminum Oxyde
Glycerin